Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.

Study in technical sciences Includes supplementary material: sn.pub/extras

Autorentext

Alexey Ivanov is currently working as a research scientist at the Fraunhofer Institute for Solar Energy Systems (Fraunhofer ISE, Germany) on developing and optimizing anodization processes for large-scale fabrication of semiconductor photovoltaic cells and batteries.

Inhalt
Silicon Anodization: State of the Art.- Experimental, Characterization and Simulation Methods.- Microscale Study of Anodization Process.- Anodization Process as a Structuring Technique: Experiments and Simulation.