Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed. Contents

• Silicon Anodization: State of the Art

• Experimental, Characterization and Simulation Methods

• Microscale Study of Anodization Process

• Anodization Process as a Structuring Technique: Experiments and Simulation Target Groups

• Researchers and students of microsystems technology, electrochemistry, microengineering

• Practitioners in the area of microsystems, silicon processing and electrochemical material processing

Autorentext

Alexey Ivanov is currently working as a research scientist at the Fraunhofer Institute for Solar Energy Systems (Fraunhofer ISE, Germany) on developing and optimizing anodization processes for large-scale fabrication of semiconductor photovoltaic cells and batteries.

Inhalt
Silicon Anodization: State of the Art.- Experimental, Characterization and Simulation Methods.- Microscale Study of Anodization Process.- Anodization Process as a Structuring Technique: Experiments and Simulation.