A textbook for senior undergraduate and graduate level students that offers a novel and systematic look into the dynamics of MEMS. It includes numerous solved examples together with the proposed problems.

This much-needed textbook is an exploration of a key area of study in mechanics. It is suitable for senior undergraduate and graduate level students and offers a novel and systematic look into the dynamics of MEMS. A highly practical treatment of the subject, it includes numerous solved examples together with the proposed problems. The material to be found here will also be of interest to researchers with a non-mechanical background. The book focuses on the mechanical domain, specifically the quasi-static sub-domain, and provides an in-depth treatment of problems that involve reliable modeling, analysis and design.

Focuses on the mechanical domain (specifically, the quasi-static sub-domain), which is at the core of most of the MEMS Provides a more in-depth look at the main problems that involve reliable modeling, analysis, and design Request lecturer material: sn.pub/lecturer-material

Inhalt
Microcantilevers and Microbridges: Bending and Torsion Resonant Frequencies.- Micromechanical Systems: Modal Analysis.- Energy Losses in MEMS and Equivalent Viscous Damping.- Frequency and Time Response of MEMS.