This book presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. In also provides analysis and treatment for the most common static and dynamic phenomena in MEMS.

MEMS Linear and Nonlinear Statics and Dynamics presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. This book also provides an in-depth analysis and treatment of the most common static and dynamic phenomena in MEMS that are encountered by engineers. Coverage also includes nonlinear modeling approaches to modeling various MEMS phenomena of a nonlinear nature, such as those due to electrostatic forces, squeeze-film damping, and large deflection of structures. The book also:

Includes examples of numerous MEMS devices and structures that require static or dynamic modeling
Provides code for programs in Matlab, Mathematica, and ANSYS for simulating the behavior of MEMS structures
Provides real world problems related to the dynamics of MEMS such as dynamics of electrostatically actuated devices, stiction and adhesion of microbeams due to electrostatic and capillary forces
MEMS Linear and Nonlinear Statics and Dynamics is an ideal volume for researchers and engineers working in MEMS design and fabrication.

Includes examples of numerous MEMS devices and structures that require static or dynamic modeling Provides code for programs in Matlab, Mathematica, and ANSYS for simulating the behavior of MEMS structures Provides real world problems related to the dynamics of MEMS that have not been covered in other books, including Dynamics of electrostatically actuated devices, stiction and adhesion of microbeams due to electrostatic and capillary forces and mechanical shock of microstructures Provides provides comprehensive coverage for the analytical and computational approaches to model MEMS structures and devices Includes supplementary material: sn.pub/extras

Inhalt
MEMS and their unique behavior.- Lumped modeling principles.- Lumped modeling of MEMS devices.- Introduction to nonlinear mechanics.- Introduction to nonlinear oscillations.- Introduction to structural mechanics.- Introduction to computational methods in MEMS.- Special Topic I: Global dynamics of electrostatically actuated devices.- Special Topic II: Sticktion and adhesion of microbeams due to electrostatic and capillary forces.- Special Topic III: Mechanical shock of microstructures.