As miniaturization, batch fabrication, and integrated electronics rapidly enable the development of a broad range of smart products, MEMs, MOEMS, and NEMS are creating enormous opportunities for commerce and functionality. This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. The MEMS/NEMS HANDBOOK (Microelectromechanical Systems/Nanoelectromechanical Systems) covers all of the major topics within the subject including design methods, fabrication techniques, manufacturing methods, sensors and actuators, and Micro Optical Electro Mechanical Systems. The many applications of MEMS technology include computer devices, electronics, instrumentation, industrial process control, biotechnology, medicine, chemical systems, office equipment, and communications. More than 100 coauthors from nearly 20 countries present clearly written, self-contained, accessible and comprehensive contributions with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists. The remarkable breadth and depth of the topics spanning this diverse field require the 5-volume extent of this notable reference resource that is based on the work of an internationally recognized board of coauthors.

The first comprehensive reference dedicated to the multi-disciplinary area of MEMS / NEMS

100 contributing authors from 19 countries

Comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods

Includes current medical applications of MEMS technology.

Provides applications of MEMS to opto-electronic devices

Broad coverage of MEMS applications in sensors and actuators

Includes supplementary material: sn.pub/extras

Klappentext

Micro-Electro Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate. While the electronics are fabricated using integrated circuit (IC) process sequences (e.g., CMOS, Bipolar, or BICMOS processes), the micromechanical components are fabricated using compatible micromachining processes that selectively etch away parts of the silicon wafer or add new structural layers to form the mechanical and electromechanical devices. MEMS promises to revolutionize nearly every product category by bringing together silicon-based microelectronics with micromachining technology, thereby, making possible the realization of complete systems-on-a-chip.

Microelectromechanic systems will revolutionize the design of electronics products and enable the creation of entirely new product categories.   Through miniaturization, batch fabrication, and integration with electronics, this technology will enable the development of smart products by providing the required interface between the available computational power and physical world through the perception and control capabilities of micro devices or systems (e.g., microsensors and microactuators). Micromechanical devices and systems are inherently smaller, lighter and faster than their macroscopic counterparts, and in many cases are also more precise. MEMS devices are emerging as a product differentiators in numerous markets. MEMS technology is expected to have enormous opportunities in the commercial markets due to the low-cost, high functionality, and small size and weight of the devices. MEMS technology allows much more functionality to be placed within a given space than conventional technologies.

A special class of MEMS is optical MEMS technology, also referred to as MOEMS (Micro Optical Mechanical Systems). MOEMS have become increasingly important in the development of manynetworks, telecommunications and optical systems. Potential MOEMS applications include optical data storage, optical sensors, bead mounted displays and projection systems. State-of-the-art devices include torsional mirrors, digital micromirror devices, laser scanners, optical shutters, microooptical switches, and micromachined corner cube reflectors.

Nanoelectromechanical systems (NEMS) are MEMS scaled to submicrometer dimensions, to exploit the mechanical degree of freedom on the nanometer scale. In this size regime, it is possible to attain extremely high fundamental frequencies while simultaneously preserving high mechanical responsivity. This combination of attributes translates directly into high force sensitivity, operability at ultra-low power, and the ability to induce non-linearity with very modest control forces, leading to potential payoffs in a diverse range of fields from medicine to biotechnology.

The MEMS/NEMS HANDBOOK consists of five volumes and will provide a significant and uniquely comprehensive reference source for research workers, practitioners, computer scientists, students, technologists and others on the international scene for years to come:

(1) MEMS/NEMS Design Methods in MEMS/NEMS

(2) Fabrication Techniques in MEMS/NEMS

(3) Manufacturing Methods

(4)  Sensors & Actuators

(5) Medical Applications and MOEMS

This landmark work features contributions from more than 100 of the world's foremost authorities on the key technologies and the greatly significant application areas of MEMS/NEMS. The contributors come from industry, government and academia.

Inhalt
Volume 1.- Design Methods in MEMS/NEMS.- Web-Enabled Database System Development for Design and Manufacturing of Micro-Electro-Mechanical Systems (MEMS).- Manufacturing Advisory Service Systems for Concurrent and Collaborative Design of MEMS Devices.- Web-Enabled Knowledge Intensive Support Framework for Collaborative Design of MEMS.- Techniques in Proper Orthogonal Decomposition and Component Mode Synthesis for the Dynamic Simulation of Complex MEMS Devices and their Application.- Techniques in Global Optimal Design for MEMS and their Applications.- Theory and Design of Micromechanical Vibratory Gyroscopes.- A Hierarchical Design Platform for Microelectrofluidic Systems.- Techniques in Electrostatics Analysis of MEMS and their Applications.- Techniques for Efficient Analytical and Simulation Methods in the Prototyping of MEMS Systems Volume 2.- Fabrication Techniques for MEMS/NEMS.- Techniques in the Fabrication of High-Speed Micro-Rotors for MEMS Applications.- Fabrication Techniques in Micromachined Capacitive Ultrasonic Transducers and their Applications.- GaAs Thermally Based MEMS Devices Fabrication Techniques, Characterization and Modeling.- Novel MEMS Fluidic Integrated Circuit Technology with 'MOSFET-Like Microvalve Elements'.- Hydrogel-based µTAS in Microfluidic Devices and their Applications.- Crosslinked PMMA as a Low-Dimensional Dielectric Sacrificial Layer for MEMS/NEMS and Quantum Nanostructures Fabrication.- Techniques and Applications of Capactive Micromachined Ultrasonic Transducers Volume 3.- Manufacturing Methods in MEMS/NEMS.- Techniques in the Development of Micromachine Tool Prototypes and their Applications in Microfactories.- Tool-based Micro Machining and Applications in MEMS.- Micro-machined Passive Valves: Fabrication Techniques, Characterisation and their Application.- Rapid Prototyping and Rapid Tooling Techniques for the Manufacturing of Silicon, Polymer, Metal and CeramicMicrodevices.- Injection Molding Techniques for the Fabrication of MEMS Elements.- Excimer Laser Machined Three-Dimensional MicrostructuresTechniques and Application.- Techniques in Scanning Acoustic Microscopy for Enhanced Failure and Material Analysis of Microsystems.- Production Scheduling in MEMS Manufacturing Volume 4.- Sensors and Actuators in MEMS/NEMS.- MEMS-based Accelerometers and their Application to Vibration Suppression in Hard Disk Drives.- Micromachined Thermal Accelerometer without Proof Mass.- Techniques in MEMS Devices for Micro Humidity Sensors and their Applications.- …