Thin films and nanostructures play key roles in a sensor, including structural support, reliability enhancement, and transduction. These materials are discussed here in the context of transduction and how they contribute to today's sensor revolution.

This book discusses advances in the area of functional thin films for sensors and novel concepts for future breakthroughs. The focus is on guidelines and design rules for sensor systems, interaction between functional thin films and other sensor subsystems, fundamentals behind the intrinsic functionality in sensing thin films and nanostructures, state-of-the-art technologies used to develop sensors today and concrete examples of sensor designs.

Inhalt
Sensor Design Guidelines.- Transduction Principles.- Growth and Synthesis of Nanostructured Thin Films.- Integrated Micromachining Technologies for Transducer Fabrication.- Applications of Functional Thin Films and Nanostructures in Gas Sensing.- Chemical Sensors: New Ideas for the Mature Field.- Applications of Functional Thin Films for Mechanical Sensing.- Sensing Infrared and Terahertz Regions by Functional Films.