Thin films and nanostructures play key roles in a sensor, including structural support, reliability enhancement, and transduction. These materials are discussed here in the context of transduction and how they contribute to today's sensor revolution.

This book discusses advances in the area of functional thin films for sensors and novel concepts for future breakthroughs. The focus is on guidelines and design rules for sensor systems, interaction between functional thin films and other sensor subsystems, fundamentals behind the intrinsic functionality in sensing thin films and nanostructures, state-of-the-art technologies used to develop sensors today and concrete examples of sensor designs.

Klappentext

Thin films and nanostructures can play multiple roles in a sensor including structural support, reliability enhancement, filtering and transduction. These micro and nano structured materials are discussed here in the context of transduction and how they contribute to the current sensor revolution. This book covers an account of general sensors theory, design considerations, and specific case studies of functional thin films and nanostructure applications in sensing as it demonstrates the whole design process. The book is also intended to provide the more experienced designers with a condensed summary of sensor design methodology and excellent references that will prove useful in future sensor design endeavors. This book is also of interest to those with a deep knowledge of such areas of science and engineering as materials science, physics, chemistry, biology, mechanical and electrical engineering.

Inhalt
Sensor Design Guidelines.- Transduction Principles.- Growth and Synthesis of Nanostructured Thin Films.- Integrated Micromachining Technologies for Transducer Fabrication.- Applications of Functional Thin Films and Nanostructures in Gas Sensing.- Chemical Sensors: New Ideas for the Mature Field.- Applications of Functional Thin Films for Mechanical Sensing.- Sensing Infrared and Terahertz Regions by Functional Films.