The aim and scope of this book is to focus on providing the industrial and research community with a single source of information on micro and nanofabrication techniques. as they apply to a variety of engineering materials. The hands-on material in the book shows how to apply established and research based laboratory manufacturing techniques as they apply to a variety of engineering materials including silicon.

Autorentext

Doctor Mark James Jackson is an Associate Professor of Mechanical Engineering Technology at Purdue University and was a Visiting Fellow at the University of Liverpool, U.K.

Doctor Jackson is active in research work concerned with understanding the properties of materials in the field of micro scale metal cutting, micro and nano abrasive machining, and laser micro machining. He is also involved in developing next generation manufacturing processes and biomedical engineering. Doctor Jackson has directed, co-directed, and managed research grants funded by the Engineering and Physical Sciences Research Council, The Royal Society of London, The Royal Academy of Engineering, European Union, Ministry of Defence, Atomic Weapons Establishment, National Science Foundation, N.A.S.A. and U. S. Department of Energy.

Doctor Jackson is Vice President and Chief Technology Officer of Vitrified Technologies, Inc., which is established to develop next generation nano and micro machine tools and cutting tools for nanotechnology applications. Dr. Jackson is strongly committed to working closely with manufacturing industry and has served on political committees to ensure that manufacturing counts.

Inhalt
Principles of Micro- and Nanofabrication.- Microfabrication Using X- ray Lithography.- Manufacturing High Aspect Ratio Microstructures.- Meso-Micromachining.- Mechanical Micromachining.- Microgrinding.- Diamond Microcutting Tools.- Laser Micro- and Nanofabrication.- Micromachining Using Pulsed Water Droplets.- Diamond Nanogrinding.- Nanomachining.- Micro-and Nanomanufacturing.