Laser Processing and Diagnostics

Inhalt

1 Laser - Solid Interactions: Fundamentals and Applications.- Fundamentals of Laser Annealing.- Inhomogeneous Energy Deposition in Crystalline Silicon with Picosecond Pulses of One Micron Radiation.- Instabilities of Crystallization in Amorphous Germanium Under Pulsed Laser Irradiation.- Time Resolved Calorimetry of 30 nm Te-Films During Laser Annealing.- Pulsed Laser Annealing of GaAs: A Comparison Between Calculation and Experiment.- Melting Model for UV Lasers.- Applications of Laser Annealing.- Optical Regulation Using Crystalline Silicon.- Optical and Electrical Properties of Laser Annealed Heavily Doped Silicon.- CW-Laser Annealing of CdTe Epitaxial Layers.- InSb Optical and Electrical Property Changes Induced by Multi-Pulsed TEA C O2-Laser Irradiation.- Laser Processing in Silicon on Insulator (SOI) Technologies.- Laser Recrystallisation of Silicon-on-Oxide.- Fundamentals of Laser Micromachining of Metals.- Surface Modelling During Laser Microprocessing.- 2 Photophysics and Chemistry of Molecule - Surface Interactions.- Electronic Structure of Adsorbed Layers.- Laser Photochemistry of Molecular Systems Involving Gas-Surface Interactions.- Selective Laser-Induced Heterogeneous Chemistry on Surfaces.- Spectroscopy of Adsorbates by Transient Laser Calorimetry.- Laser Vaporization of Clean and C0-Covered Polycrystalline Copper Surfaces.- Laser Investigation of the Dynamics of Molecule-Surface Interactions.- 3 Photoassisted Chemical Processing.- 3.1 Deposition.- Laser-Induced Chemical Vapor Deposition.- Structure of Platinum and Tin Films Formed by Laser-Induced Chemical Vapor Deposition.- Laser Deposition of Single Crystalline GaAs and Stimulated Sheet Doping.- IR Laser Photo-Assisted Deposition of Silicon Films.- IR Laser Pyrolysis of Silane.- Multiphoton Excitation and Dissociation of SiH4 Exposed to CO2 Laser Radiation.- Deposition of Silicon Films by Photodissociation of Silane Under IR Laser Irradiation.- Characterization of Reactive Intermediates in Silicon Etching and Deposition Using Laser Techniques.- The Physics of Ultraviolet Photodeposition.- Low Temperature Growth of HgTe by a UV Photosensitisation Method.- Applications of Excimer Lasers to Semiconductor Processing.- Linear-Focused ArF Excimer Laser Beam for Depositing Hydrogenated Silicon Films.- Analysis of UV Laser-Induced Heterogeneous Deposition: Platinum.- Laser Photolytic Deposition of Metals on Indium Phosphide.- Laser Photochemical Deposition of Metals.- 3.2 Oxide Formation.- Laser Assisted Pyrolytic Growth and Photochemical Deposition of Thin Oxide Films.- Laser Induced Oxidation of Silicon Surfaces.- 3.3 Etching.- Laser-Assisted Chemical Etching of Inorganic Materials: Mechanistic Studies.- Maskless Dry Etching of GaAs by Focused Laser Beam.- Laser Induced Reduction and Etching of Oxidic Perovskites.- Laser Enhanced Plating and Etching: A Review.- Laser Surface Modification Below a Liquid Layer.- Selectivity of Etching III-V Compounds by Laser-Induced Electrochemistry.- Photochemical Microetching of InP.- Ultraviolet Laser Ablation of Organic Polymer Films.- 3.4 Compound Formation.- Laser-Induced Synthesis of Compound Semiconductors.- Laser Synthesis of Thin Film CuInSe2.- Metal/Silicon Reactions Using Pulsed Excimer and Ruby Lasers.- Structural Investigation of Laser Processed PZT Ceramics.- Light-Induced Sublimation of Cadmium Sulphide.- 3.5 Applications.- Laser Direct Writing Applications.- Laser Fabrication of Integrated Circuits.- 4 Diagnostics of Laser Processing, Materials, and Devices.- Thermal and Acoustic Techniques for Monitoring Pulsed Laser Processing.- Temperature Diagnostics for Laser Writing.- Laser Selective Photoionization Technique: Photoion Beam Epitaxy and Semiconductor Trace Impurity Diagnostics.- Optical Microanalysis of Device Materials and Structures.- Laser Diagnostics of Submicron VLSI-Structures.- Determination of the Mechanical Amplitude Distribution of Quartz Crystal Resonators by Use of a New Noninterferometric Laser Speckle Vibration Measurement System.- Characterization of Laser Induced Defects in (Al,Ga)As by Photoetching and TEM Measurements.- Optical Characterization of Implantation Damage Recovery and Electrical Activation in GaAs by Raman Scattering.- Characterization of Gallium Arsenide Layers on Insulators with Germanium Interface Islands.- Surface-Enhanced Raman Scattering as a Diagnostic Method in Preparing Organic Semiconductor Films.- Raman-Microsampling Technique Applying Optical Levitation by Radiation Pressure.- Photothermal Analysis of Thin Films.- 5 Laser Diagnostics in Reactive Gaseous Systems.- Raman Diagnostics of Heterogeneous Chemical Processes.- Laser Spectroscopy and Gas-Phase Chemistry in CVD.- Laser Diagnostic Studies of Plasma Etching and Deposition.- Light Scattering Diagnostics of Gas-Phase Epitaxial Growth (MOCVD-GaAs).- On the Generation of C2-Radicals by IR-Multiple-Photon Dissociation.- Index of Contributors.