Electron Kinetics and Applications of Glow Discharges

This book resulted from the NATO Advanced Research Workshop on "Electron Kinetics and Applications of Glow Discharges," held in St. Petersburg, Russia, on May 19-23, 1997. Glow discharges have found widespread applications in many technological processes from the manufacture of semiconductors, to recent developments in na- technology, to the traditional fields of gas lasers, and discharge lamps. Consequently, the interest in the physics of glow discharges has experienced yet another resurgence of interest. While the non-equilibrium character of glow discharges is widely accepted, the opinion still prevails that the main features can be captured by fluid models, and that kinetic treatments are only required for the understanding of subtle details. The erroneousness of this belief is demonstrated by the failure of fluid models to describe many basic features of glow discharges such as, for instance, electrode phenomena, striations, and collisionless heating effects. An adequate description of glow discharges thus has to be of kinetic nature.

Inhalt

Analytical and Semi-Analytical Modeling Approaches: Principles of the Electron Kinetics in Glow Discharges;L.D. Tsendin. Basics of Numerical Plasma Modeling: Particle Simulation Methods for Glow Discharges: Past, Present and Future, with Applications; C.K. Birdsall. DC Discharges I: DC Positive Column in the Nonlocal Regime; J. Ingold. DC Discharges II: Electron Kinetics in Homogeneous and Stratified Positive Column and Anode Region; Y. Golubovskii, V. Nekuchaev. Stochastic Electron Heating I: The Dynamics of Fermi Acceleration; M.A. Lieberman. Stochastic Electron Heating II: Collisionless Electron Heating in RF Gas Discharges: II - The Role of Collisions and Non-Linear Effects; I.D. Kaganovich. Inductively Coupled Plasmas: Modeling and Diagnostics of Low Pressure Inductively Coupled Plasmas; U. Kortshagen. Discharge Kinetics in Molecular Gases: New Trends in the Kinetic Modeling of Discharges in Low Pressure Molecular Gases; C.M. Ferreira. Magnetized Discharges, Surface Wave Discharges: Surface Wave Sustained Discharges; H. Schlüter. Advanced Diagnostics I: Advanced Diagnostics I: 24 Additional Articles. Index.