This book comprehensively explores various facets of the polishing field, spanning from traditional techniques to the latest advancements in ultra-precision polishing methods. It provides an updated perspective on the current state of research, covering different ultra-precision polishing technologies, tool applications, process evolution, and future prospects. The content is structured into chapters contributed by subject matter experts worldwide, offering an authoritative overview of recent developments in ultra-precision polishing technology. The book addresses diverse levels of understanding, from foundational concepts to advanced applications. Part I focuses on finishing techniques based on polishing tools, while Part II explores fluid-assisted finishing methods. Part III discusses high-energy beam finishing techniques, and Part IV introduces other emerging finishing approaches. Finally, Part V is dedicated to the applications and developmental trends of ultra-precision polishing technologies. Each part systematically presents a specific polishing technique or application, providing the reader with a step-by-step understanding of this complex and evolving field.