A Practical Guide to Surface Metrology

This book offers a genuinely practical introduction to the most commonly encountered optical and non-optical systems used for the metrology and characterization of surfaces, including guidance on best practice, calibration, advantages and disadvantages, and interpretation of results. It enables the user to select the best approach in a given context. Most methods in surface metrology are based upon the interaction of light or electromagnetic radiation (UV, NIR, IR), and different optical effects are utilized to get a certain optical response from the surface; some of them record only the intensity reflected or scattered by the surface, others use interference of EM waves to obtain a characteristic response from the surface. The book covers techniques ranging from microscopy (including confocal, SNOM and digital holographic microscopy) through interferometry (including white light, multi-wavelength, grazing incidence and shearing) to spectral reflectometry and ellipsometry. The non-optical methods comprise tactile methods (stylus tip, AFM) as well as capacitive and inductive methods (capacitive sensors, eddy current sensors).

The book provides:

• Overview of the working principles
• Description of advantages and disadvantages
• Currently achievable numbers for resolutions, repeatability, and reproducibility
• Examples of real-world applications

A final chapter discusses examples where the combination of different surface metrology techniques in a multi-sensor system can reasonably contribute to a better understanding of surface properties as well as a faster characterization of surfaces in industrial applications. The book is aimed at scientists and engineers who use such methods for the measurement and characterization of surfaces across a wide range of fields and industries, including electronics, energy, automotive and medical engineering.

Auteur
Dr. habil. Michael Quinten is a senior staff member at FRT GmbH in Bergisch Gladbach, working as Head of R&D Sensors and Head of Technical Coordination. Previously he was project manager in development and product manager at the STEAG ETA-Optik GmbH in Heinsberg, Product Manager for "Color and Coatings" (Color measurement, coating thickness measurement and simulation), "Spectrometry UV-VIS-NIR" and "Integrated Optics". He has been Research assistant at the Universities of Chemnitz TU, University of Saarland, Ruhr-University Bochum, RWTH Aachen and visiting professor at the Karl-Franzens-University Graz.

Contenu
Practical Guide to Surface MetrologyMichael QuintenPreface1 Introduction to Surfaces and Surface Metrology1.1 Microscopic View on a Surface1.2 Macroscopic View on a Surface1.3 Measurement and Validation1.4 The Way To Reliable Surface Data2 Tactile Surface Metrology2.1 Tactile Surface Profiling2.2 Atomic Force Microscopy3 Capacitive And Inductive Surface Metrology3.1 Capacitive Surface Profiling3.2 Surface Profiling With Eddy Currents4 Optical Surface Metrology4.1 Physical Basics4.1.1 Electromagnetic waves4.1.2 Huygens-Fresnel principle of wave propagation4.1.3 Polarization4.1.4 Interference4.1.5 Coherence4.1.6 Dielectric Function and Refractive Index4.1.7 Reflection and Refraction4.1.8 Dispersion Effects4.1.9 Diffraction4.1.10 Scattering4.2 Chromatic Confocal Surface Profiling4.3 Surface Profiling with an Autofocus Sensor4.4 Light Sectional Methods4.4.1 Triangulation4.4.2 Line Projection4.4.3 Fringe Projection4.5 Microscopy Methods4.5.1 Classical Microscopy4.5.2 Confocal Microscopy4.5.3 Focal Depth Variation4.5.4 Scanning Near-Field Optical Microscopy4.6 Interferometric Methods4.6.1 Interferometric Form Inspection4.6.1.1 Form inspection of planar surfaces4.6.1.2 Form inspection of spherical, aspherical and freeform surfaces4.6.2 Tilted Wave Interferometry4.6.3 White Light Interferometry4.6.4 Multi-Wavelength Interferometry4.6.5 Grazing Incidence Interferometry4.6.6 Digital Holographic Microscopy4.6.7 Shearing Interferometry (Conoscopy)4.7 Wave Front Sensing (Shack-Hartmann)4.8 Deflectometry4.9 Makyoh Topography Sensor4.10 Surface Profiling Using Elastic Light Scattering4.10.1 Total Integrated Scattering (TIS)4.10.2 Angular Resolved Scattering (ARS)4.10.3 Speckle Based Roughness Determination4.11 Spectral Analysis and Characterization4.11.1 Reflectometry4.11.1.1 Optical Film Thickness Determination4.11.1.2 Critical Dimensions Determination4.11.2 Spectroscopic Ellipsometry5 Imaging Methods5.1 Classical Imaging5.2 Spectral Imaging5.3 Scanning Electron Microscopy5.4 Optical Coherence Tomography5.5 Terahertz Spectroscopy6 Multisensor - Systems - A Versatile Approach To Surface Metrology7 Appendices7.1 Appendix A: Numerics With Complex Numbers7.2 Appendix B: Levenberg-Marquardt Algorithm8 ReferencesIndex