This book introduces novel optical technologies for micro/nanofabrication that are different from the conventional fabrication methods. It provides a wealth of successful applications based on novel optical fabrication technologies.

Novel Optical Technologies for Nanofabrication describes recent advances made in micro/nanofabrication with super-resolution laser technologies, which are based on the latest research findings in the authors' groups. It focuses on new techniques and methods as well as applications and development trends in laser nanofabrication, including super-resolution laser direct writing, surface structures composed of laser path-guided wrinkle, three-dimensional laser nanofabrication based on two-photon absorption, and nanofabrication by laser interference and surface plasmon polaritons.

This book serves as a reference for academic researchers, engineers, technical professionals and graduate students in the fields of micro/nanotechnology, thin film materials, super-resolution optics and laser techniques.

Qian Liu is a Professor at Laboratory for Nanodevice, National Center for Nanoscience and Technology, China.

Xuanming Duan is a Professor at the Key Laboratory of Functional Crystals and Laser Technology, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, China

Changsi Peng is a Professor at the Institute of Information Optical Engineering, Soochow University, China.

Introduces novel optical technologies for micro/nanofabrication, that are different from the conventional fabrication methods Focuses on novel laser nanofabrication techniques with super-resolution Provides a wealth of successful applications based on novel optical fabrication technologies

Autorentext

Qian Liu received his PhD from Hokkaido University, Japan. He has more than 30 years' research experience in applied optics, near-field optics, and nano-optics, especially in ultra-high-density optical storage, super-resolution near-field structure and thin-film optics, nano-device fabrication and novel nanofabrication technology. He has published more than 100 papers. He is a full-time professor of Laboratory for Nanodevice and director of Science & Technology Managing Department at National Center for Nanoscience and Technology (NCNST), China, a professor at University of Chinese Academy of Sciences, an adjunct professor at School of Physics, Nankai University.

Xuanming Duan received his PhD from Tohoku University, Japan. He is currently professor at the Key Laboratory of Functional Crystals and Laser Technology, Technical Institute of Physics and Chemistry, Chinese Academic of Sciences, China. Prof. Duan is also a joint professor at Department of Applied Physics, Osaka University, Japan. His research interests focus on the organic photonics, nano-photonics and bio-photonics.

Changsi Peng received his Doctorate of Science from the Institute of Physics, Chinese Academy of Sciences (CAS), China, and his Doctorate of Technology from the Optoelectronics Research Centre (ORC), Tampere University of Technology, Finland. Since 2001, he has been engaged into the research of growth and processing of III-V semiconductors, especially in GaAsN-based materials, laser devices and nanotechnology. He has published more than 100 papers in peer-reviewed journals and international conference proceedings. Now he is a professor at the Institute of Information Optical Engineering, Soochow University, China.

Inhalt

Introduction.- Super-resolution Laser Direct Writing and Its Applications.- Laser path-guided wrinkle structures.- Laser Micro/Nanofabrication and Applications Based on Multiphoton Process.- Laser Interference Nano-Fabrication.- Super-Resolution Patterning and Photolithography Based on Surface Plasmon Polaritons.- Mass production of large-format micro/nano-structure based optical devices.