MEMS and Nanotechnology, Volume 4 represents one of eight volumes of technical papers presented at the Society for Experimental Mechanics Annual Conference on Experimental and Applied Mechanics, held at Uncasville, Connecticut, June 13-16, 2011. The full set of proceedings also includes volumes on Dynamic Behavior of Materials, Mechanics of Biological Systems and Materials, Mechanics of Time-Dependent Materials and Processes in Conventional and Multifunctional Materials; Optical Measurements, Modeling and, Metrology; Experimental and Applied Mechanics, Thermomechanics and Infra-Red Imaging, and Engineering Applications of Residual Stress.

Collection devoted to MEMS and Nanotechnology from the Proceedings of the 2011 Annual Conference on Experimental and Applied Mechanics Includes supplementary material: sn.pub/extras

Autorentext
Dr. Tom Proulx is the Executive Director of the Society for Experimental Mechanics, Inc.

Klappentext
MEMS and Nanotechnology represents one of eight volumes of technical papers presented at the Society for Experimental Mechanics Annual Conference & Exposition on Experimental and Applied Mechanics, held at Uncasville, Connecticut, June 13-16, 2011. The full set of proceedings also includes volumes on Dynamic Behavior of Materials, Mechanics of Biological Systems and Materials, Mechanics of Time-Dependent Materials and Processes in Conventional and Multifunctional Materials; Optical Measurements, Modeling and, Metrology; Experimental and Applied Mechanics, Thermomechanics and Infra-Red Imaging, and Engineering Applications of Residual Stress.

Inhalt
Integrated Process Feasibility of Hard-mask for Tight Pitch Interconnects Fabrication.- Thermoelectric Effects in Current Induced Crystallization of Silicon Microstructures.- Evaluation of Resistance Measurement Techniques in Carbon Black and Carbon.- Nano-tubes Reinforced Epoxy.- A Nano-tensile Tester for Creep Studies.- The Measurement of Cyclic Creep Behavior in Copper Thin Film Using Microtensile Testing.- New Insight Into Pile-Up in Thin Film Indentation.- Measuring Substrate-independent Young's Modulus of Thin Films.- Analysis of Spherical Indentation of an Elastic Bilayer Using a Modified Perturbation Approach.- Nano-indentation Studies of Polyglactin 910 Monofilament Sutures.- Analytical Approach for the Determination of Nanomechanical Properties for Metals.- Advances in Thin Film Indentation.- Cyclic Nanoindentation Shakedown of Muscovite and its Elastic Modulus Measurement.- Assessment of Digital Holography for 3D-shape Measurement of Micro Deep Drawing Parts in Comparison to Confocal Microscopy.- Full-field Bulge Testing Using Global Digital Image Correlation.- Experimental Investigation of Deformation Mechanisms Present in Ultrafine-grained Metals.- Characterization of a Variation on AFIT's Tunable MEMS Cantilever Array Metamaterial.- MEMS for Real-time Infrared Imaging.- New Insights Into Enhancing Microcantilever MEMS Sensors.- A Miniature MRI-compatible Fiber-optic Force Sensor Utilizing Fabry-Perot Interferometer.- Micromechanical Structure With Stable Linear Positive and Negative Stiffness.- Terahertz Metamaterial Structures Fabricated by PolyMUMPs.- Investigations Into 1D and 2D Metamaterials at Infrared Wavelengths.- MEMS Integrated Metamaterials With Variable Resonance Operating at RF Frequencies.- Creep Measurements in Free-standing Thin Metal Film Micro-cantilever Bending.- MEMS Reliability for Space Applications by Elimination of Potential Failure Modes Through Analysis.- Analysis and Evaluation Methods Associated With theApplication of Compliant Thermal Interface Materials in Multi-chip Electronic Board Assemblies.- Hierarchical Reliability Model for Life Prediction of Actively Cooled LED-based Luminaire.- Direct Determination of Interfacial Traction-separation Relations in Chip-package Systems