This book summarizes the current knowledge on the interaction between fast electrons and solid targets. It gives basic information important for the various analytical and process-oriented electron beam techniques.

Autorentext

Dr. Maurizio Dapor is Head of the Interdisciplinary Laboratory for Computational Science of the European Centre for Theoretical Studies in Nuclear Physics and Related Areas (ECT*-LISC). He holds a M.Sc. degree in Physics and a Ph.D. degree in Materials Science and Engineering. His research covers Monte Carlo simulations of the transport of fast electrons in solids, with applications to the scanning electron microscopy and to several electron spectroscopies. He was Visiting Professor at the Departamento de Física Aplicada, Universidad de Alicante, from April to June 2016, and Leverhulme Visiting Professor at the Department of Materials Science and Engineering at the University of Sheffield from December 2014 to November 2015. He was Scientific Consultant at the Integrated Systems Laboratory of the Swiss Federal Institute of Technology (ETH), Zurich, from January to December 2009, and Research Associate at the University of Sheffield's Department of Engineering Materials from June 2007 to February 2008.

Klappentext
The interaction of electron beams with solid targets has been studied since the early part of the last century. Present interest is spurred on by the fundamental role played by the electron-solid interaction in - among other areas - scanning electron microscopy, electron-probe microanalysis and Auger electron spectroscopy. This book aims to investigate selected aspects of the interaction of electrons with matter (backscattering coefficient for bulk targets, absorption, backscattering and transmission for supported and unsupported thin films, implantation profiles, secondary electron emission and so on); to study the probabilistic laws of interaction of the individual electrons with the atoms (elastic and inelastic cross sections); to introduce the Monte Carlo method and its use for computing the macroscopic characteristics of the interaction processes. Each chapter compares theory, simulations and experimental data.

Inhalt
The Spin of the Electron.- Elastic Scattering.- Inelastic Scattering.- Electrons Impinging on Solid Targets.- Monte Carlo Simulations.- Matrices and Operators.- The Dirac Notation.- Special Functions.