This book is written in a uniform and comprehensive style. It provides the readers with fundamental and up-dated knowledge on all aspects important of epitaxy and epitaxial growth techniques. It is easy to read by both newcomers in the field as well as the experienced specialists in this film technology and characterization.

An important advantage of this book against monographs devoted to one detailed method of epitaxial crystallization, e.g. MBE, CBE, MOVPE or ALE, is that it allows the non-specialist in the definite growth technique to learn about the characteristic technological features of all the other methods Contains an up-dated reference list of more than 1000 positions Includes supplementary material: sn.pub/extras

Inhalt
I. Basic Concepts.- 1. Introduction.- 2. Homo- and Heteroepitaxial Crystallization Phenomena.- 3. Application Areas of Epitaxially Grown Layer Structures.- II. Technical Implementation.- 4. Solid Phase Epitaxy.- 5. Liquid Phase Epitaxy.- 6. Vapor Phase Epitaxy.- 7. Molecular Beam Epitaxy.- 8. Metal Organic Vapor Phase Epitaxy.- III. In-situ Analysis of the Growth Processes.- 9. In-situ Analysis of Species and Transport.- 10. In-situ Surface Analysis.- IV. Physics of Epitaxy.- 11. Thermodynamic Aspects.- 12. Atomistic Aspects.- 13. Quantum Mechanical Aspects.- V. Heteroepitaxy.- 14. Heteroepitaxy; Growth Phenomena.- 15. Material-Related Problems of Heteroepitaxy.- 16. Closing Remarks.- References.- List of Abbreviations.- List of Metalorganic Precursors.