This book presents a unique methodology of precious and original scientific work in optical microscopy that is scarce to be found elsewhere. It covers modern 3D optical microscopy to provide a solid understanding of microscopic optics and imaging theory. With an inspiring development in diffractive image microscopy and ANN-based reverse mapping modeling, this is an invaluable book for precision optics, precision metrology, optical testing, biomedical engineering, and physics students or staff taking R&D on optical microscopy, as well as advanced undergraduates, professionals, and researchers looking for an accessible introduction to the field.

Covers important optics fundamentals in 3D optical microscopy Explains to reconstruct truly 3D surface information by optical microscopy Describes how to develop a novel method by merging ANN to resolve difficulties

Autorentext

Dr. Liang-Chia Chen is a distinguished professor in the Department of Mechanical Engineering at National Taiwan University (NTU), Taiwan. Before his academic career at NTU, he worked as a full-time research engineer at Gerard Industries of Australia (Clipsal) and the Institute of Nuclear Energy Research (INER) of Taiwan for over 15 years. Before joining NTU, he served as a distinguished professor at National Taipei University of Technology in Taipei and as an adjunct professor at the University of South Australia in Australia. His primary research fields are precision metrology and manufacturing, semiconductor metrology, automated optical inspection (AOI), AI-powered metrology, opto-mechatronics instrumentation, and 3D machine vision and algorithms for automation. Mr. Wei-Hsin Chein received his M.S. in Mechanical Engineering from National Taiwan University. His research focuses on optical critical dimension (OCD) metrology, inverse problems, and semiconductor advanced packaging. Sanjeev Kumar Singh earned his Master degree in Mechanical Engineering from National Taiwan University (NTU). His research focuses on optical metrology, automated optical inspection (AOI), and opto-mechatronics instrumentation. Dr. Guo-Wei Wu earned his Ph.D. in Mechanical Engineering from National Taiwan University (NTU). His research focuses on optical metrology, automated optical inspection (AOI), and opto-mechatronics instrumentation.

Inhalt

Introduction.- Related techniques.- Theoretical background.- Formation of diffractive Images.- ANN based methodology.- System design and experiment setup.- Experimental results and analysis.- Summary.