This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements.

Provides several known methods including a jet of gas, intense acoustic waves, and others Illustrates best practices and lessons learned in Levitation Written for experts in this field

Autorentext

Kirill Poletkin obtained his Ph.D. degree at Moscow Aviation Institute (Moscow State Aviation Technological University), Russia in 2007. Since 2016, he is a scientist at Karlsruhe Institute of Technology as a scientist. In 2020, he is also appointed as an assistant professor at Innopolis University. His research interest includes micro- and nano-scales electromechanical devices and processes of the energy transfer within these scales.

Inhalt
Introduction to levitation micro-systems.- Micro-fabrication techniques.- Analytical modelling.- Quasi-finite element modelling.- Inductive levitation micro-systems.- Hybrid levitation micro-systems.- Mechanical thermal noise in levitated micro-gyroscopes.