Inelastic Particle-Surface Collisions

The interaction of particles and photons with solid surfaces is interdisci plinary in character, so that very recent developments in solid-state phys ics, surface physics and atomic physics stimulate progress in the field or profit from results of the "ion-solid" community. Technical interest in the field ranges from catalysis and semiconductor manufacturing to fusion re search, for instance by surface analytical techniques, or interest in phenom ena such as sputtering and radiation damage. The Third International Workshop on Inelastic Ion-Surface Coll isions, held at Feldkirchen-Westerham under the auspices of Max-Planck-Institut fUr Plasmaphysik, Garching, Fed. Rep. of Germany, brought together 63 scientists from 12 countries for three days of very involved discussions. As at the pre vious workshops at Bell Laboratories in 1976 and McMaster University in 1978, the experiment of gathering experts from seemingly different disciplines was very successful in promoting the basic physical ideas. The proceedings contain the 14 major reviews and a smaller number of con tributions presented at the workshop. All papers have been reviewed with little delay, and the reviewer's efforts are gratefully acknowledged. The first group of papers is concerned with theoretical and experimental aspects of secondary electron emission due to ion impact, including the potential emission caused by slow metastables. This is followed by reviews of exper iments and recent theoretical developments of electron- and photon-induced desorption.

Klappentext

The interaction of particles and photons with solid surfaces is interdisci­ plinary in character, so that very recent developments in solid-state phys­ ics, surface physics and atomic physics stimulate progress in the field or profit from results of the "ion-solid" community. Technical interest in the field ranges from catalysis and semiconductor manufacturing to fusion re­ search, for instance by surface analytical techniques, or interest in phenom­ ena such as sputtering and radiation damage. The Third International Workshop on Inelastic Ion-Surface Coll isions, held at Feldkirchen-Westerham under the auspices of Max-Planck-Institut fUr Plasmaphysik, Garching, Fed. Rep. of Germany, brought together 63 scientists from 12 countries for three days of very involved discussions. As at the pre­ vious workshops at Bell Laboratories in 1976 and McMaster University in 1978, the experiment of gathering experts from seemingly different disciplines was very successful in promoting the basic physical ideas. The proceedings contain the 14 major reviews and a smaller number of con­ tributions presented at the workshop. All papers have been reviewed with little delay, and the reviewer's efforts are gratefully acknowledged. The first group of papers is concerned with theoretical and experimental aspects of secondary electron emission due to ion impact, including the potential emission caused by slow metastables. This is followed by reviews of exper­ iments and recent theoretical developments of electron- and photon-induced desorption.

Inhalt
Electron Emission.- Electron Emission from Solids During Ion Bombardment. Theoretical Aspects.- Ion-Induced Auger Electron Emission from Solids.- Interaction Between Metastable Rare Gas Atoms and Surfaces.- Deexcitation of Metastable He-Atoms Interacting with Clean and Adsorbate Covered Metal Surfaces.- Electron and Photon Impact.- The Use of Angle-Resolved Electron and Photon Stimulated Desorption for Surface Structural Studies.- Auger-Initiated Desorption from Surfaces: Review + Prospects.- Optical Radiation from Electron Sputtering of Alkali Halides.- Electron Transfer.- Electron Capture and Loss to Continuum States in Gases and Solids.- New Experiments with Electron Capture Spectroscopy at Ni, Cd and Cr Surfaces.- Electronic Excitation in Ion-Molecule Collisions.- Charge Fractions of Reflected Particles.- Plasma Effects in the Theory of Charge Fractions.- Polarized Light Emission.- Polarization of Balmer Radiation from Crazing Incidence Collisions of Protons on Surfaces.- LY? Polarization After Electron Capture in Ion-Surface Interaction.- Light Emission and Circular Polarization by Ion Surface Scattering at Crazing Incidence.- Orientation of Target and Projectile States After N+-He-Collisions with Impact Parameter Selection.- Excited Particle Emission.- Outer Shell Excitation During Sputtering and Low Energy lon Scattering.- Comment on the Energy Distribution of Excited Recoil Atoms.- Quantitative Aspects of Outer-Shell Excitation in lon-Surface Collisions.- Theory of Charge States in Sputtering.- Boundary Conditions for Models of Ion and Excited-State Formation in the Sputtering Process.- On the Velocity Measurements of Sputtered Excited Atoms.- Index of Contributors.