The volumes XI, XII and XIII examine the physical and technical foundation for recent progress in applied scanning probe techniques. These volumes constitute a timely comprehensive overview of SPM applications. Real industrial applications are included.

The ability to accurately and reproducibly measure the properties and perf- mance characteristics of nanoscale materials, devices, and systems is a critical enabler for progress in fundamental nanoscience, in the design of new nanoma- rials, and ultimately in manufacturing new nanoscale products [1]. This quotation from the US National Nanotechnology Initiative emphasizes the need for measu- ment tools in emerging nanomaterial applications, a eld predicted to generate a multibillion-dollar market within 10 years. One speci c measurement need is for nanomechanical information knowledge on the nanoscale of mechanical prop- ties such as elastic modulus, adhesion, and friction. Accurate information is essential not only to predict the performance of a system before use, but also to evaluate its reliability during or after use. The measurement need is motivated partly by the fact that new applications often involve structures with nanoscale dimensions (e. g. , nanoelectromechanical systems, nanoimprint lithography). Measurements of such structures by necessity must provide nanoscale spatial resolution. Other new structures have larger overall dimensions, but integrate disparate materials on the micro- or nanoscale (e. g. , electronic interconnect, nanocomposites). In such cases, nanoscale information is needed in order to differentiate the properties of the various components. Many methods to measure small-scale mechanical properties have been devised, including ones based on indentation [2 4], on ultrasonics [5,6], and on other phy- cal phenomena [7,8]. Such methods often have drawbacks: they are not suf ciently quantitative, are limited to specialized geometries, and so forth.

First book summarizing the state of the art of this technique Real industrial applications included Includes supplementary material: sn.pub/extras

Autorentext
Dr. Bharat Bhushan received an M.S. in mechanical engineering from the Massachusetts Institute of Technology in 1971, an M.S. in mechanics and a Ph.D. in mechanical engineering from the University of Colorado at Boulder in 1973 and 1976, respectively, an MBA from Rensselaer Polytechnic Institute at Troy, NY in 1980, Doctor Technicae from the University of Trondheim at Trondheim, Norway in 1990, a Doctor of Technical Sciences from the Warsaw University of Technology at Warsaw, Poland in 1996, and Doctor Honoris Causa from the Metal-Polymer Research Institute of National Academy of Sciences at Gomel, Belarus in 2000. He is a registered professional engineer (mechanical) and presently an Ohio Eminent Scholar and The Howard D. Winbigler Professor in the Department of Mechanical Engineering, Graduate Research Faculty Advisor in the Department of Materials Science and Engineering, and the Director of the Nanotribology Laboratory for Information Storage & MEMS/NEMS (NLIM) at the Ohio State University, Columbus, Ohio. He is an internationally recognized expert of tribology on the macro- to nanoscales, and is one of the most prolific authors in the field. He is considered by some a pioneer of the tribology and mechanics of magnetic storage devices and a leading researcher in the fields of nanotribology and nanomechanics using scanning probe microscopy and applications to micro/nanotechnology.

Inhalt
Oscillation Control in Dynamic SPM with Quartz Sensors.- Atomic Force Microscope Cantilevers Used as Sensors for Monitoring Microdrop Evaporation.- Mechanical Diode-Based Ultrasonic Atomic Force Microscopies.- Contact Atomic Force Microscopy: A Powerful Tool in Adhesion Science.- Contact Resonance Force Microscopy Techniques for Nanomechanical Measurements.- AFM Nanoindentation Method: Geometrical Effects of the Indenter Tip.- Local Mechanical Properties by Atomic Force Microscopy Nanoindentations.- Thermal Activation Effects in Dynamic Force Spectroscopy and Atomic Friction.