Covering the complete design cycle of nanopositioning systems, this is the first comprehensive text on the topic. The book first introduces concepts associated with nanopositioning stages and outlines their application in such tasks as scanning probe microscopy, nanofabrication, data storage, cell surgery and precision optics. Piezoelectric transducers, employed ubiquitously in nanopositioning applications are then discussed in detail including practical considerations and constraints on transducer response. The reader is then given an overview of the types of nanopositioner before the text turns to the in-depth coverage of mechanical design including flexures, materials, manufacturing techniques, and electronics. This process is illustrated by the example of a high-speed serial-kinematic nanopositioner. Position sensors are then catalogued and described and the text then focuses on control.

Several forms of control are treated: shunt control, feedback control, force feedback control and feedforward control (including an appreciation of iterative learning control). Performance issues are given importance as are problems limiting that performance such as hysteresis and noise which arise in the treatment of control and are then given chapter-length attention in their own right. The reader also learns about cost functions and other issues involved in command shaping, charge drives and electrical considerations. All concepts are demonstrated experimentally including by direct application to atomic force microscope imaging.

Design, Modeling and Control of Nanopositioning Systems will be of interest to researchers in mechatronics generally and in control applied to atomic force microscopy and other nanopositioning applications. Microscope developers and mechanical designers of nanopositioning devices will find the text essential reading.

Enriches understanding of precision control theory Explains the complete process of nanopositioning control including practical difficulties and their solution Reinforces basic principles with experimental application in atomic force microscope

Autorentext

The authors have twenty years combined experience in the design, fabrication and control of precision mechatronic systems. Dr. Fleming is a Senior Lecturer and Australian Research Fellow at the School of Electrical Engineering and Computer Science, The University of Newcastle, Australia. His research includes nanopositioning, sensors, atomic force microscopy and nanofabrication. Dr. Leang, is an Associate Professor of Mechanical Engineering at the University of Nevada-Reno, Nevada. His research includes the modeling and control of piezo actuators for scanning probe microscopy, fabrication and control of electroactive polymers, and the design of microelectromechanical systems (MEMS) for nanotechnology.

Inhalt

Introduction.- Piezoelectric Transducers.- Types of Nanopositioners.- Mechanical Design: Flexure-based Nanopositioners.- Position Sensors.- Shunt Control.- Feedback Control.- Force Feedback Control.- Feedforward Control.- Command Shaping.- Hysteresis Modeling and Control.- Charge Drives.- Noise in Nanopositioning Systems.- Electrical Considerations.