Inertial Microsensors

This book provides a solid foundation in theory of inertial measurement, introduces design fundamentals, and offers design recipes for implementation of inertial instruments on the micro-scale. Constructive computational examples illustrate the material.

Inertial Microsensors presents methods for analysis and design of inertial micromachined sensors, with the primary focus on accelerometers and gyroscopes. Micro accelerometers are a type of solid-state sensors which is used for measurement of linear acceleration, and subsequently velocity and displacement. Micro Gyroscopes are inertial sensors for direct measurement of either angular orientation or angular velocity. The aim of the book is to provide solid foundation in theory of inertial measurement, introduce design fundamentals, and provide design recipes for implementation of inertial instruments on the micro-scale. All discussions in the book are supported by constructive computational examples illustrating the material. The purpose of the book is to offer an overview of the field, introduce fundamental concepts, explicitly define design objectives for each type of inertial sensors, summarize solutions for achieving the design objectives, and discuss methods for fabrication, packaging, and testing micromachined accelerometers and gyroscopes.

The first book in the market to provide in-depth coverage of inertial microsensors accelerometers and gyroscope Provides solid foundation in theory of inertial measurement, design fundamentals, and implementation recipes In-depth studies and examples help the reader to develop their own design flow for an inertial sensor with desired characteristics Comprehensive illustrations, micro photographs, and scanning electron microscope images present important design features, motivation, and inspiration for readers Overviews and comprehensive appendices outlining emerging developments, information resources, and relevant publications

Klappentext

This excellent volume lays out methods for the analysis and design of inertial micromachined sensors. The aim of the book is to provide readers with a solid foundation in the theory of inertial measurement, introduce them to design fundamentals, and provide them with design recipes for implementation of inertial instruments on the micro-scale. All of the discussions in the book are supported by constructive computational examples illustrating the material.

Inhalt
Theory of Inertial Measurement.- Devices for Inertial Measurement.- Design Fundamentals.- Accelerometers.- Gyroscopes.- Sources of Errors in Inertial Sensors.-Fabrication Techniques for Inertial Sensors.- Advanced Topics in Inertial Sensors Development.- Packaging of Inertial Sensors.