Advanced Technologies Based on Wave and Beam Generated Plasmas

This volume is based on the lectures at the NATO Advanced Study Institute, entitled "Advanced Technologies Based on Wave and Beam Generated Plasmas", held at Sozopol, Bulgaria, from May 22 till June 1, 1998. It attracted almost 100 participants from 16 different countries. The meeting combined different types of scientists from advanced experts to aspiring young researchers. It aimed at stimulating future development by providing-across borders- cross-fertilization and exchanges between previously unconnected groups. This is reflected in the contents of the volume which covers the lectures given. The book also contains in a second part 43 poster presentations mostly from younger participants with valuable complementations and specifica tions to the lectures. With its topics the Advanced Study Institute constitutes the first attempt to bring together in an organized manner three areas of work on plasma technologies: advanced efforts based on wave generated---high frequency-····plasmas, on plasma assisted ion implantation and on electron beam generated plasmas.

Zusammenfassung
Proceedings of the NATO Advanced Study Institute, Sozopol. Bulgaria, May 22-June 1, 1998

Inhalt
1: Lectures.- Plasma Discharges for Materials Processing and Display Applications.- The Development and Use of Surface-Wave Sustained Discharges for Applications.- Electrodeless Gas Discharges for Lighting.- Plasma Production above Multipolar Magnetic Field Structures: from DC Magnetrons to Distributed ECR.- ECR Plasmas for Thin-Film Deposition.- Deposition Properties and Applications of Carbon-Based Coatings.- Substrate Biasing during Plasma Processing: Interest, Methods and Limitations.- Ion Energy Distributions.- Dusty Plasmas: Fundamental Aspects and Industrial Applications.- Plasma Based Ion Implantation.- Waveguide Stationary and Nonstationary Discharges: Modelling and Experiments.- Nonuniformity Aspects in Modelling and Noncollisional Heating of HF Discharges.- Travelling Wave Discharges in Nitrogen: Modelling and Experiment.- Atmospheric Pressure Discharges: Travelling Wave Plasma Sources.- Modelling of Atmospheric Pressure Microwave Sustained Discharges.- Long Microwave Discharges.- Waves in Bounded Magnetized Plasmas.- Electron Beam Generated Plasmas: Theory, Experiments, Applications.- EBIT: An Electron. Beam Source for the Production and Confinement of Highly Ionized Atoms.- 2: Posters.- The Anisotropie Etching of Silicon in CF4, CF4 + H2 and CF4?xClx Plasma.- CF2 Production by CF4 Electron Impact Dissociation in Gas Discharge.- On Negative Ions Langmuir Probe Measurements in an Ar + 4% CF4 Currentless Plasma.- Plasma Treatment of Polymer Surfaces in Different Gases.- Plasma Treatment of Polymer Surfaces in Gas Mixture.- Field Emission Characteristics of Thin MPCVD Diamond Films.- Technological Method of Substratum Metallization by Plasma-Arc Deposition.- Hydrodynamic and Electrical Characterization of Corona Discharge Plasma Reactor.- Study by MassSpectrometry and Gas Chromatography of Fluorocarbon Waste Destruction in a Low-Pressure Plasma Reactor.- CARS Applied to Plasmas for NO-Reduction.- Heating and Melting of the Dust Crystal in a RF Discharge. Non-Linear Analysis.- Intense Plasma Pulses in Doping, Coating and Glazing the Surface of Solid Materials.- Monoatomic Ion Rich DECR Plasmas for Ion Implantation by Plasma Immersion Using a New High Voltage-High Current Pulse Generator.- Spatial Distribution and Kinetics of Negative Ions in Glow DC Discharge in Pure O2 and H2.- Diffusion and Wall Loss of Magnesium in Decaying Plasma.- Diffusion and Depopulation of the Metastable Cd3P0,2 States in Collisions with Neon Atoms.- Non-Local Regime of Self-Consistency in Stationary Waveguided Discharges.- Symmetric Mode in a Planar Plasma Waveguide: Numerical Study of Nonlinear Effects.- Modulation Instabilities of Surface-Wave Sustained Discharges.- Correlation and Spectrum Analysis of Instabilties in Waveguided Discharges.- Pulsed Surface Wave Sustained Discharges: Modelling.- Pulsed Discharges Produced by Surface Waves in 3-cm Wavelength Band in the Air.- Pulsed Microwave Discharge in Nitrogen: Diagnostics and Modelling.- The Turning Back and the Turning Forward of the Wave Number in Surface Wave Propagation.- Experimental Indications for the Existence of Plasma Resonances in Surface Wave Discharges.- Test Surface Waves as a Diagnostics Tool for SWSD.- Optical Spectroscopy Diagnostics of Waveguided Discharges in a Non-Stationary Regime.- A New Passive Compensation Technique for Probes in Oscillating Electric Fields.- Modelling of Radio Frequency Capacitively Coupled Plasma at Intermediate Pressures.- Two-Dimensional Mapping of the Electron Energy Distribution Function.- Modelling of the Equivalent Circuit of InductivelyCoupled Plasma Sources.- Optical Measurements of Gas Temperature in Microwave Discharge Plasmas in Hydrogen.- Gas Temperature Influence on the Particle Kinetics in a Surface-Wave-Sustained Nitrogen Discharge.- Excited Atoms and Charged Particles Axial Distributions in Argon Microwave Plasmas at Various Gas Pressures.- A Study of Excitation Mechanisms in Atmospheric Microwave Induced Argon Plasmas.- 2D Model for a Microwave Sustained Discharge in Nitrogen at Atmospheric Pressure.- Influence of Ionization Effects on Drift-Dissipative Instability.- Investigation of the Electron Distribution Functions in Low Pressure Electron Cyclotron Resonance Discharges.- Electromagnetic Waves in a Magnetized Plasma Column.- Magnetoplasmons Guided by a Gyrotropic Plasma Layer on a Metal Substrate.- Wave Propagation in a Free Gyrotropic Plasma Layer.- Source of an Annular Controlled Radius Plasma.- Beam-Plasma Instability Effects Supporting Capacitive Low Pressure RF Discharges.- Author Index.