Microelectromechanical systems (MEMS) refer to a collection of
micro-sensors and actuators, which can react to environmental
change under micro- circuit control. The integration of MEMS into
traditional Radio Frequency (RF) circuits has resulted in systems
with superior performance levels and lower manufacturing costs. The
incorporation of MEMS based fabrication technologies into micro and
millimeter wave systems offers viable routes to ICs with MEMS
actuators, antennas, switches and transmission lines. The resultant
systems operate with an increased bandwidth and increased radiation
efficiency and have considerable scope for implementation within
the expanding area of wireless personal communication devices. This
text provides leading edge coverage of this increasingly important
area and highlights the overlapping information requirements of the
RF and MEMS research and development communities.

Provides an introduction to micromachining techniques and their
use in the fabrication of micro switches, capacitors and
inductors
Includes coverage of MEMS devices for wireless and Bluetooth
enabled systems

Essential reading for RF Circuit design practitioners and
researchers requiring an introduction to MEMS technologies, as well
as practitioners and researchers in MEMS and silicon technology
requiring an introduction to RF circuit design.

Autorentext

Vijay K. Varadan, Department of Electrical Engineering, University of Arkansas, Fayetteville, Arizona, USA
Vijay Varadan is an established Wiley author and is currently a Professor in the Department of Electrical Engineering at the University of Arkansas, USA. Varadan's new book for Wiley, Smart Material Systems and MEMS, is due to publish later this year, and he has previously co-authored Microwave Electronics, RF MEMS and their Applications, Microsensors, MEMS and Smart Devices and Microstereolithography and other Fabrication Techniques for 3D MEMS. He is also Editor-in-Chief of the SPIE's Journal of Smart Materials and Structures.

K. J. Vinoy is an Assistant Professor in the Department of Electrical Communication Engineering at the Indian Institute of Science, Bangalore, India. He received an M.Tech degree in Electronics from the Cochin University of Science and Technology, India and a Ph.D. degree in Engineering Science and Mechanics from the Pennsylvania State University, USA, in 1993 and 2002, respectively. From 1994 to 1998, he worked at the National Aerospace Laboratories, Bangalore, India. Following this, he was a research assistant at the Center for the Engineering of Electronic and Acoustic Materials and Devices (CEEAMD) at the Pennsylvania State University from 1999 to 2002. He continued there to carry out postdoctoral research from 2002 to August 2003. His research interests include several aspects of microwave engineering, RF-MEMS and smart material systems. He has published over 50 papers in technical journals and conference proceedings. His other publications include two books, namely Radar Absorbing Materials: From Theory to Design and Characterization, and RF-MEMS and their Applications. He also holds one US patent.

K. A. Jose is the author of RF MEMS and Their Applications, published by Wiley.

Zusammenfassung
Microelectromechanical systems (MEMS) refer to a collection of micro-sensors and actuators, which can react to environmental change under micro- circuit control. The integration of MEMS into traditional Radio Frequency (RF) circuits has resulted in systems with superior performance levels and lower manufacturing costs. The incorporation of MEMS based fabrication technologies into micro and millimeter wave systems offers viable routes to ICs with MEMS actuators, antennas, switches and transmission lines. The resultant systems operate with an increased bandwidth and increased radiation efficiency and have considerable scope for implementation within the expanding area of wireless personal communication devices. This text provides leading edge coverage of this increasingly important area and highlights the overlapping information requirements of the RF and MEMS research and development communities.

Provides an introduction to micromachining techniques and their use in the fabrication of micro switches, capacitors and inductors
Includes coverage of MEMS devices for wireless and Bluetooth enabled systems
Essential reading for RF Circuit design practitioners and researchers requiring an introduction to MEMS technologies, as well as practitioners and researchers in MEMS and silicon technology requiring an introduction to RF circuit design.

Inhalt

Preface.

Microelectromechanical Systems (MEMS) and Radio Frequency
MEMS.

MEMS Materials and Fabrication Techniques.

RF MEMS Switches and Micro Relays.

MEMS Inductors and Capacitors.

Micromachined RF Filters.

Micromachined Phase Shifters.

Micromachined Transmission Lines and Components.

Micromachined Antennae.

Integration and Packaging for RF MEMS Devices.

Index.