Nanoprocessing by means of electrochemical techniques is finding increasing application in various areas such as microelectronics, sensors, materials science, and corrosion; it has also generated new fields of research to promote interaction between biology, medicine, and microelectronics. Such interactions have led to novel approaches to miniaturization and an increased ability to fabricate structures with high lateral and vertical resolution. Understanding processes for the fabrication of nanoscale films and structures is essential for the development of new precision nanofabrication techniques.

This volume reviews nanotechnology applications in selected high technology areas with particular emphasis on near- and long-term advances in these fields. The chapters in the book are classified under four different headings: Nanotechnology for energy devices, Nanotechnology for magnetic storage devices, Nanotechnology for bio-chip applications, and Nanotechnology for MEMS/Packaging. This book is suitable for scientists, engineers, and graduate students in electrochemistry, nanotechnology, microelectronics, sensors, materials science, and corrosion science.

Zusammenfassung

In this book, the term "electrochemical nanotechnology" is defined as nanoprocessing by means of electrochemical techniques. This introductory book reviews the application of electrochemical nanotechnologies with the aim of understanding their wider applicability in evolving nanoindustries. These advances have impacted microelectronics, sensors, materials science, and corrosion science, generating new fields of research that promote interaction between biology, medicine, and microelectronics.

This volume reviews nanotechnology applications in selected high technology areas with particular emphasis on advances in such areas. Chapters are classified under four different headings: Nanotechnology for energy devices - Nanotechnology for magnetic storage devices - Nanotechnology for bio-chip applications - Nanotechnology for MEMS/Packaging.

Inhalt
Nanotechnology for Energy Devices.- Nanotechnologies for Li Batteries.- Nanotechnologies for Fuel Cells.- Nanotechnology for Material Development on Future Energy Storage.- Micro/Nano Fabrication Technologies and Micro Flow Devices for Future Energy Devices.- Nanotechnologies for Magnetic Storage Devices.- Magnetic Heads.- Magnetic Thin Films for Perpendicular Magnetic Recording Systems.- Cusp-Field Single-Pole-Type (CF-SPT) Head for Perpendicular Recording.- Perpendicular Magnetic Recording Medium for a Density Beyond 1 Tera Bit/inch2.- Nanotechnology for Bio-Chip Applications.- Micro pH Sensors and Biosensors Based on Electrochemical Field Effect Transistors.- Electrochemical and Magnetic Technologies for Bio Applications.- Nano-Bio Electrochemical InterfacingLinking Cell Biology and Micro-Electronics.- Nanotechnology for MEMS/NEMS and Advanced Packaging.- Electrochemically Fabricated Microelectromechanical Systems/Nanoelectromechanical Systems (MEMS/NEMS).- Microelectronic Packaging Trends and the Role of Nanotechnology.- Electrochemical Fabrication Process for ULSI Interconnects.