This book focuses on the design and development of SU-8 polymer and silicon waveguide-based devices using the effective index based matrix method. Various fabrication techniques like laser direct writing (LDW), Focused Ion Beam (FIB) and optical lithography are discussed. FIB lithography has been explored for photonic-crystal structures on the waveguide and for directional coupler in coupled region. This technique is shown to be suitable in fabricating photonic crystal structures as well as for making any precise modifications in micro- and nano-meter photonic waveguide structures. This book can be a useful reference for students, researchers, and fabrication engineers working in the areas of integrated optics, optical communications, laser technology and optical lithography for device manufacturing.

Autorentext
Dr. Swagata Samanta received her Ph.D from the Advanced Technology Development Centre (ATDC), Indian Institute of Technology Kharagpur (IIT-KGP) in 2018. She continued her research as a postdoctoral fellow at the Centre for Nano Science and Engineering (CeNSE), Indian Institute of Science (IISc) Bangalore. Presently, she is a postdoctoral research assistant in the School of Engineering, University of Glasgow, Scotland, UK. Her research interests include novel on-chip nanophotonic and nanoelectronic devices, integrated optics, VLSI systems, image processing, and artificial intelligence.

Dr. Pallab Banerji obtained his Ph.D from Jadavpur University, Kolkata, India. Presently, he is serving as a Professor and Head of the Materials Science Centre, Indian Institute of Technology Kharagpur. His major research areas are low dimensional semiconductors: structures and devices, photonics, thermoelectrics, and compound semiconductors. He has published about 120 research papers in international journals and guided more than 15 doctoral students.

Dr. Pranabendu Ganguly received his Ph.D in 2000 from the Indian Institute of Technology Kharagpur in integrated optics. Currently, he is working as senior scientific officer at the Advanced Technology Development Centre (ATDC), IIT Kharagpur. His recent areas of interest include micro- and nano-photonic devices, and guided wave optics. Dr. Ganguly has published 95 research papers in national and international journals, and conference proceedings. He is a Fellow of the Optical Society of India.

Inhalt