Ultra-precision machining is a promising solution for achieving excellent machined surface quality and sophisticated micro/nano-structures that influence the applications of components and devices. Further, given the ultrathin layer of material removed, it is a highly coupled process between cutting tool and material. In this book, scientists in the fields of mechanical engineering and materials science from China, Ukraine, Japan, Singapore present their latest research findings regarding the simulation and experiment of material-oriented ultra-precision machining. Covering various machining methods (cutting, grinding, polishing, ion beam and laser machining) and materials (metal, semiconductor and hard-brittle ceramics), it mainly focuses on the evaluation of the fundamental mechanisms and their implementation in processing optimization for different materials. It is of significant theoretical and practical value for guiding the fabrication of ultra-smooth and functional surfaces using ultra-precision machining.

Autorentext
Editor: Dr. Junjie Zhang currently is a full-position Professor in Center for Precision Engineering, Harbin Institute of Technology, China. His current research interests are focused on fundamental of ultra-precision machining, design and fabrication of funcational micro/nanostructures, nano-scale friction and wear of nano-materials, computational materials science, etc. He was awarded the Second Class Award in Research Achievements (Science and Technology), Ministry of Education, China, 2016, Outstanding Young Scholar of Harbin Institute of Technology in 2016, Merit award of 2012 Hiwin Doctoral Dissertation Award, Senior membership of the Chinese Mechanical Engineering Society.
Editor: Dr. Bing Guo currently is a full-position associate professor in Center for Precision Engineering, Harbin Institute of Technology, China. His current research interests are focused on ultra-precision grinding technology, design and fabrication of novel grinding tool, laser micro-machining, etc. He published more than 70 academic papers, and received ten patents. He was awarded the first Class Award in Research Achievements (Science and Technology), Heilongjiang. Province, China, 2017.

Editor: Dr. Jianguo Zhang obtained his BSc and MS degrees in Mechanical Engineering from Harbin Institute of Technology in China in 2008 and 2010, respectively. With the support of the China Scholarship Council, he pursued his graduate studies at the Department of Mechanical Science and Engineering, Nagoya University, Japan. He completed his PhD degree at Nagoya University in 2014 with a thesis on Micro/Nano Machining of Steel and Tungsten Carbide Utilizing Elliptical Vibration Cutting Technology. He subsequently became an Assistant Researcher at the Changchun Institute of Optics, Fine Mechanics and Physics in China, prior to joining Nagoya University as a designated Assistant Professor at the Department of Aerospace Engineering in 2017. His research interests include elliptical vibration cutting technology and the precise fabrication of functional micro/nano-structures on difficult-to-cut materials. In recognition of his practical research on the high-accuracy amplitude control sculpturing method in elliptical vibration cutting, he won the Japan Society for Precision Engineering's Young Researcher Award in 2015.

Inhalt
Fundamentals of nanometric cutting of nanotwinned copper.- Investigation into plastic deformation and machining induced subsurface damage of high-entropy alloys.- Investigation into the realization of a single atomic layer removal in nanoscale mechanical machining of single crystalline copper.- Theoretical and experimental study of thermally assisted microcutting of brittle single crystal materials.- Cutting mechanism and surface formation of ultra-precision raster fly cutting.- Modeling and experimental study of surfaces optoelectronic elements from crystal materials in polishing.- Advanced applications of elliptical vibration cutting in micro/nano machining.- Ultra-precision machining of hard and brittle materials with coarse-grained grinding wheels.- Processing of high-precision ceramic balls in guide V-grooves with a variable curvature.- The contribution of ion plasma sprayed coating to performance of precision diamond dressing tools.