This book is a compilation of selected papers from the 7th International Conference on Nanomanufacturing (nanoMan2021), held in Xi'an on November 17-19, 2021 after postponing twice due to COVID-19 pandemic. It encompasses the synthesis of nanomaterials, the fabrication of devices, the characterization of various products and systems, process monitoring and quality control, simulations, and the applications of nanoscience and nanotechnologies.

Autorentext

1) Shuming Yang, is a professor at School of Mechanical Engineering, Xi'an Jiaotong University (XJTU), China. He achieved his BSc and MSc in mechanical engineering from XJTU, and Ph.D. in nanotechnology and instrumentation from University of Huddersfield (UoH) of the UK. He then started to work at UoH, after that he joined in XJTU till now. His research areas include micro-/nano-fabrication and metrology, optical technology and instrumentation, precision/ultra-precision manufacturing etc. He has held more than 20 research projects including National Key R&D Program of China, National Science and Technology Major Projects etc. He has published more than 120 academic papers and owned 50 patents of PCT, UK, European and China. He achieved the first class of Science and Technology Progress Award from the Ministry of Education, the first class of Machinery Industry Science and Technology Award of China, the first class of Shaanxi Science and Technology Award, and the second class of Science and Technology Progress Award from the Chinese Society for measurement (CSM) etc. He was elected as a fellow of the International Society for Nanomanufacturing (ISNM). He was a winner of New Century Excellent Talents Support Program and achieved the National Science Fund for Excellent Young Scholars etc. He is an associate editor of Journal of Manufacturing Systems, an editor of Nanomanufacturing and Nanometrology, a guest editor of Measurement Science and Technology, and a guest editor of the International Journal of Advanced Manufacturing Technology etc. 2) Xichun Luo is a Professor in ultra-precision manufacturing and technical director of Centre for Precision Manufacturing (CPM) at the University of Strathclyde (Glasgow). He is an Elected Fellow of the International Society for Nanomanufacturing and International Academy of Engineering and Technology. He is also a member of scientific committee of European Society of Precision Engineering & Nanotechnology (euspen). He is an Associate Editor for Proceeding of IMechE Part C: Journal of Mechanical Engineering Science, Journal of Micromanufacturing and Mechanical Sciences, and an editorial board member for Micromachines, Journal of Nanomanufacturing and Metrology and International Journal of Extreme Manufacturing. He is the Past-President of The Chinese Automation and Computing Society in the UK. He obtained his PhD in ultra precision manufacturing at Harbin Institute of Technology (China) and second PhD in Precision Engineering at Leeds Metropolitan University (UK). From 2004 to 2007, he worked at Cranfield University as a key research officer and delivered the world leading research in ultra precision diamond turning and grinding of freeform optics. From 2007 to 2012 he was a lecturer at Heriot-Watt University. From 2012 to 2013 he was a Reader in ultra precision manufacturing at the University of Huddersfield where he leads an Advanced Machining Research Group within the EPSRC Centre for Innovative Manufacturing in Advanced Metrology. He has published more than 100 papers in peer-reviewed highly ranked journals, 2 book and 5 invited book chapters etc. 3) Yongda Yan is a professor and deputy dean of School of Mechatronics Engineering of Harbin Institute of Technology now. He is the editor of two international journals: Nanomanufacturing and Metrology, Manufacturing Letters. He received his M.S. and Ph.D. degrees in mechanical engineering from Harbin Institute of Technology in 2001 and 2007, respectively. His main research field is the ultraprecision machining and micro/nano machining techniques. More than 100 papers are published in the SCI indexed journals. He hold twenty Chinese patents. His Honors and awards include Winner of National Youth Top-notch Talent Support Program, Winner of Program for New Century Talents Support Program, Winner of National Science Fund for Excellent Young Scholars, Winner of National 100 Excellent Doctoral Theses, and so on. 4) Zhuangde Jiang, a professor of Xi'an Jiaotong University (XJTU), academician of Chinese Academy of Engineering. He is currently the Honorary Professor of University of Birmingham and Visiting Professor of University of New South Wales., vice director of Science and Technology Commission of Ministry of Education. He is also the chairman of Shaanxi Association for Science and Technology, a member of mechanical engineering discipline of assessment groups of the academic degree commission of the state council, vice chairman of Chinese society of Mechanical Engineering, vice chairman of Chinese Society of Micro-Nano Technology, director of International Joint Research Laboratory of "Micro/Nano Manufacturing and Measurement Technology". He has won many prizes and awards, including two National Awards of Technological Innovation, one National Award of Science and Technology Progress, and nine provincial and ministerial level awards. He is also the recipient of National Prize for Innovation and Pioneering and the Prize for Scientific and Technological Progress of Ho Leung Ho Lee Foundation. He's also gained the award for Outstanding Contribution to Degree and Graduate Education in Xi'an Jiao Tong University.

Inhalt

Advanced Nanomaterials.- Micro/Nanomachining.- Laser Micro/Nano Materials Processing.- Micro/Nanopatterning,Micro-featured Surfaces &Surface Modification.- Micro/Nanoforming.- Process Monitoring and Quality Control.- Modeling & Simulation at Micro/Nano Scale.- Nanoscale,Multiscale Modelling & Analysis.- Nano Characterization and Tools.- Nano/Microsystems &Auto-assembly.- High Precision Machines.- Micro/Nano-electromechanical Systems.- Ultraprecision Manufacturing Systems.- Optical Machining & Measurement.- Atomic and Close-to-atomic Scale Manufacturing (ACSM).- Other Technologies Associated with Micro/Nano Manufacturing