In recent years, micro- and nanotechnologies became key technologies, having a significant effect on the development of new products and production technologies, as well as on novel medical diagnosis and treatment methods. Moreover, due to their enormous potential for new applications, micro- and nanotechnologies, in future, will increasingly affect our every days life, with an impact, comparable to that of the industrial revolution in the 19th century, or the developments in microelectronics in the 20th century.

Although, micro- and nanotechnologies, in general, are regarded as two independent disciplines, there is obviously an intense interaction between these two fascinating technologies. The term "MicroNano Integration", in this context, addresses the enormous potential of synergy effects, provided by the combination and mutual integration of micro- and nanotechnological elements.

In order to discuss the integration aspects of micro- and nanotechnologies, the "International Forum on MicroNano Integration", a conference, held in Potsdam, Germany on December 3 - 4, 2003 brought together researchers from both communities - from industries as well as from scientific institutions. The contributions to this book reflect the discussions during the conference.

Inhalt

Center for Integrated Nanotechnologies (CINT): Science-Base for Future Integrated Systems.- An Analysis of the Different MEMS Companies-Business Models.- MicroNano Technology Services Offering New Market Opportunities To Industry.- International Country Rankings in Patented Nanotechnology.- Financing of MEMS/MOEMS and Nanotechnology in Germany.- Performance Analysis of Low Drift Micro-Machined Gyroscopes for Inertial Navigation Systems.- Nanoscale and Microsystem-Technology: New Approaches for Thermoelectric Devices.- Micromixer Module With an Integrated Optical Pressure Gauge.- Multi-Layer PMMA Microfluidic Systems for Ammonia Detection.- Nanoscale Materials meet Microsystems-Technology Metal Oxide Semiconductor Chemical Sensors: From a Simple Resistor to a Tunable Microelectronic Device.- The New Type Of Transducer For Gas And Bio-Sensors.- Frequency Changes in the Second Derivative of Currant - Voltage Characteristics of SnO2-Si the Heterostructures During Gas Adsorption for Different Thickness of the Adsorptive Layers.- Light Processing with Electrostatically Driven Micro Scanning Mirrors and Micro Mirror Arrays.- New Combination of SiGe RF Amplifier ICs with High-O MEMS Components for Wireless Communication Radio Transceivers.- Design and Realisation of an Add-Drop Multiplexer Using Digital Micromirror.- Functionalization of Cantilever Array Sensors Using InkJet Deposition.- Optimized Creation of Monolayers for Parallel Readout of Bead-Based Assays.- Integrating Molecular Structures into the Macroscopic World by a Combination of Microsystem Technology and Self-Assembly Methods.- Nanoimprinting-a Key Enabling Technology for BioMEMS and Biomedical Applications.- Coriolis-lnduced Flow Control for Micro- and Nanofluidic Lab-on-a-Disk Technologies.- One Dimensional Microarrays for Genetic Testing and Diagnostics.- SEMI International Standards Program-Focus on MEMS.- Extreme Ultraviolet Radiation from Pulsed Discharges: A New Access to "Nanoscopy" and "Nanolytics".- Four Point Bending Test of Thin Films in the nm Through to ?rn Range.- Methods for Reconstruction of Atomic Force Microscope Data Based on Morphological Image Processing.- Optical 3D-Micro Structure Measurement System Based on a Laser Scanning Confocal Microscope.- Adsorption Sensitivity of Microporous Silicon to Organic and Biomolecules with High Dipole Moment.- Nanoengineered Inorganic/Organic Composite Microcapsules.- Mounting at the Nanoscale by Addressing Nanostructured Biological Templates - Another Packaging Strategy for Nanoscaled Electronics?.- New Functional Materials for MicroNano Fabrication and Devices.- Nanoscalic Sol-Gel-Fillers in Fibre-Chip-Adhesives.- Multilayers and Multicomponents-Layers Produce in Atmosphere of Metalloorganic Compounds of Aluminum in Arc Plasma Discharge of Titanium-New Technology MO PVD-Arc.- Nanomanipulations in the Optical Near Field.- Highly Efficient Micro Structuring of Metals, Ceramics and Dielectrics with Nd:YAG and Excimer Lasers.- Manufacturing Engineering for Nanoproduction.- Compact Laboratory EUV-Lamp: "In-House Beamlines" for Technologies Based on Extreme Ultraviolet Radiation.- Laboratory for Machine Tools and Production Technology: A Novel Assembly Method for Chip/Wafer Bumping and MEMS Integration.- Microcontroller Modules for the Modular MEMS Framework MATCH-X.- Microreliability, Nanoreliability-lssues for MEMS.- Cost Savings with Micro / Nano-Replication.- Feasibility Study of the Fabrication of 2D Polymer Photonic Crystals by X-Ray Lithography.- Behaviour of Flexible Hinges for Use as Articulations in High Precision Mechanisms.- Design Optimisation Applied To A Cantilever Type Piezoresistive Accelerometer.- Design and Implementation of a Flexible Guiding System in Translation.- Appendix: List of Contributors.