This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. The author also presents dislocation in silicides, fatigue and fracture aspects. A special chapter is given on deformation in silicides in the nano scale. Composites and alloys are also considered.

Autorentext

Joshua Pelleg received his B.Sc. in Chemical Engineering at the TechnionInstitute of Technology, Haifa, Israel a M.Sc. in Metallurgy at the Illinois Institute of Technology, Chicago, IL and a Ph.D. in Metallurgy at the University of Wisconsin, Madison, WI. He has been in the BenGurion University of the Negev (BGU) Materials Engineering Department in BeerSheva, Israel since 1970, and was among the founders of the department, and served as its second chairman. Professor Pelleg was the recipient of the Samuel Ayrton Chair in Metallurgy. He specializes in the mechanical properties of materials and the diffusion and defects in solids. He has chaired several university committees and served four terms as the Chairman of Advanced Studies at BenGurion University of the Negev. Prior to his work at BGU, Pelleg acted as Assistant Professor and then Associate Professor in the Department of Materials and Metallurgy at the University of Kansas, Lawrence, KS. Professor Pelleg was also a Visiting Professor: in the Department of Metallurgy at Iowa State University at the Institute for Atomic Research, US Atomic Energy Commission, Ames, IA at McGill University, Montreal, QC at the Tokyo Institute of Technology, Applied Electronics Department, Yokohama, Japan and in Curtin University, Department of Physics, Perth, Australia. His nonacademic research and industrial experience includes: Chief Metallurgist in Urdan Metallurgical Works Ltd., Netanyah, Israel Research Engineer in International Harvester Manufacturing Research, Chicago, IL Associate Research Officer for the National Research Council of Canada, Structures and Materials, National Aeronautical Establishment, Ottawa, ON Physics Senior Research Scientist, Nuclear Research Center, BeerSheva, Israel Materials Science Division, Argonne National Labs, Argonne, IL Atomic Energy ofCanada, Chalk River, ON Visiting Scientist, CSIR, National Accelerator Centre, Van de Graaf Group Faure, South Africa Bell Laboratories, Murray Hill, NJ and GTE Laboratories, Waltham, MA. His current research interests are diffusion in solids, thin film deposition and properties (mostly by sputtering) and the characterization of thin films, among them various silicides.

Inhalt

1 What are the silicides

References

2 Structure

References

3 Fabrication

3.1 Bulk Silicides

3.1.1 Arc Casting (Melting) 3.1.2 Directional Solidification

3.1.2.1 Bridgman

3.1.2.2 Czochralski 3.2 Thin Fims

3.2.1 Sputtering

3.2.2 Electron Beam Deposition

References

4 Testing Deformation

4.1 Introduction

4.2 Tension 4.2.1 CoSi2

4.2.2 NiSi2 4.2.3 MoSi2

4.2.4 WSi2 4.2.5 FeSi2

4.2.6 TiSi2 4.3 Compression

4.3.1 Introduction

4.3.2 CoSi2

4.3.3 MoSi2

4.3.4 WSi2 4.3.5 TiSi2

4.4 Indentation-Hardness

4.4.1 Introduction 4.4.2 NiSi2 film

4.4.3 MoSi2 Single Crystal 4.4.3.1 MoSi2 Film

4.4.4 WSi2 Film (Coating) 4.4.5 a-FeSi2

4.4.6 TiSi2

References

5 Dislocations in silicides

5.1 Introduction

5.2 Dislocations in CoSi2

5.2.1 Single Crystal

5.2.2 Film-Single Crystal Epitaxy

5.3 Dislocations in NiSi2

5.3.1 Epitaxial Thin Film

5.4 Dislocations in MoSi2 5.4.1 Single Crystals

5.5 Dislocations in WSi2 5.5.1 Single Crystals

5.6 Dislocations in WSi2 5.6.1 Single Crystals

References

6 Time Dependent Deformation - Creep in Silicides

6.1 Fundamentals od Creep 6.2 Creep in CoSi2

6.3 Creep I MoSi2 6.4 Creep in MoSi2-WSi2

6.5 Creep in TiSi2 References

7 Fatigue in Silicides

7.1 Basics

7.2 Silicide Composites 7.2.1 Fatigue in MoSi2 Composites

7.2.1.1 Nb Reinforcement 7.2.1.2 Reinforcement-Nb Spheres

7.2.1.3 Reinforcement-Nb Fibers

References

8. Fracture in Silicides

   8.1 Fracture in CoSi2 Single Crystals

   8.2 Fracture in polycrystalline CoSi2

   8.3 Fracture in MoSi2 Single Crystals

   8.4 Fracture in Polycrystalline MoSi2

   8.5 Fracture in WSi2 Single Crystals

   8.6 Fracture in Polycrystalline TiSi2 References

9. Deformation in Nano Silicides

   9.1 Introduction 9.2 Tension Test

   9.3 Hardness Tests 9.3.1 Hardness in Nano MoSi2

   9.3.2 Hardness in Nano FeSi2 9.3.3 Hardness in Nano TiSi2

   References

10. The Effect of B

    10.1 Introduction 10.2 B Effect in CoSi2

    10.3 B Effect in MoSi2

    10.4 B Effect in TiSi2

    References

11. Silicide Composites

    11.1 Introduction

    11.2 MoSi2 Based Composites

    11.2.1 MoSi2/SiC

    11.2.2 MoSi2/Si3N4

    11.3 MoSi2/Silicide Composite

    11.3.1 MoSi2/TaSi2

    11.3.2 MoSi2/WSi2 11.3.2 MoSi2/Mo5Si3

    11.4 WSi2 Based Composites 11.4.1 WSi2/SiC

    11.5. WSi2/Silicides 11.5.1 WSi2/TaSi2

    11.5 TiSi2 Based Composites 11.5.1 TiSi2/SiC

    Referances

    12 Alloying in Silicides

    12.1 Introduction 12.2 Alloying of NiSi2

    12.3 Alloying of MoSi2

    12.3.1 Metallic Element Addition 12.3.2 Solid Solution Hardening (Softening

    References

12. Grain Size Effect on Mechanical Properties

    13.1 Introduction 13.2 MoSi2 Static Properties

    13.3 MoSi2 Creep (Time Dependent) Properties

    13.4 Ti5Si3 Static Properties

    13.5 Ti5Si3 Creep (Time Dependent) Properties

    References

13. Environmental Effect on Mechanical Properties

    14.1 Introduction

    14.2 CoSi2-Oxidation

    14.3 NiSi2-Oxidation

    14.4 MoSi2-Oxidation

    14.5 WSi2-Oxidation 14.6 TiSi2-Oxidation

    References