Electron Kinetics and Applications of Glow Discharges

This book resulted from the NATO Advanced Research Workshop on Electron Kinetics and Applications of Glow Discharges, held in St. Petersburg, Russia, on May 19-23, 1997. Glow discharges have found widespread applications in many technological processes from the manufacture of semiconductors, to recent developments in na- technology, to the traditional fields of gas lasers, and discharge lamps. Consequently, the interest in the physics of glow discharges has experienced yet another resurgence of interest. While the non-equilibrium character of glow discharges is widely accepted, the opinion still prevails that the main features can be captured by fluid models, and that kinetic treatments are only required for the understanding of subtle details. The erroneousness of this belief is demonstrated by the failure of fluid models to describe many basic features of glow discharges such as, for instance, electrode phenomena, striations, and collisionless heating effects. An adequate description of glow discharges thus has to be of kinetic nature.

Klappentext

This book resulted from the NATO Advanced Research Workshop on Electron Kinetics and Applications of Glow Discharges, held in St. Petersburg, Russia, on May 19-23, 1997. Glow discharges have found widespread applications in many technological processes from the manufacture of semiconductors, to recent developments in na- technology, to the traditional fields of gas lasers, and discharge lamps. Consequently, the interest in the physics of glow discharges has experienced yet another resurgence of interest. While the non-equilibrium character of glow discharges is widely accepted, the opinion still prevails that the main features can be captured by fluid models, and that kinetic treatments are only required for the understanding of subtle details. The erroneousness of this belief is demonstrated by the failure of fluid models to describe many basic features of glow discharges such as, for instance, electrode phenomena, striations, and collisionless heating effects. An adequate description of glow discharges thus has to be of kinetic nature.

Zusammenfassung
Proceedings of a NATO ARW held in St. Petersburg, Russia, May 19-23, 1997

Inhalt
Analytical and Semi-Analytical Modeling Approaches.- Principles of the Electron Kinetics in Glow Discharges.- Spherical Symmetrical Approach to the Theory of Runaway Breakdown.- Nonlocal Effects in Stationary and Non-Stationary Discharges.- Basics of Numerical Plasma Modeling.- Particle Simulation Methods for Glow Discharges: Past, Present and Future, with Applications.- Convected Scheme Simulations of Glow Discharges.- Modeling of a Magnetized Plasma: The Stationary Plasma Thruster.- DC Discharges I.- DC Positive Column in the Nonlocal Regime.- On the Radial Structure of the Electron Velocity Distribution and Related Macroscopic Properties in DC Column Plasmas.- DC Discharges II.- Electron Kinetics in Homogeneous and Stratified Positive Column and Anode Region.- Electron Kinetics in the Cathode Region of Glow Discharges. Plane and Hollow Cathodes.- A Hydrodynamic Description of Electrons in a Space-Time Varying Electric Field.- Glow-Like Discharges with Runaway Electrons.- Sthochastic Electron Heating I.- The Dynamics of Fermi Acceleration.- Application of Mapping Dynamics to Analysis of a Capacitive RF Discharge.- Electron Kinetic and Electrodynamic Characteristics of ICP in Stochastic Heating Regime.- Collisionless Electron Heating in RF Gas Discharges: I. Quasilinear Theory.- Collisionless Electron Heating in RF Gas Discharges: II. The Role of Collisions and Non-linear Effects.- The Anomalous Skin Effect in Bounded Systems.- Collisionless Heating in Capacitively-Coupled Radio Frequency Discharges.- Inductively Coupled Plasmas.- Modeling and Diagnostics of Low Pressure Inductively Coupled Plasmas.- Fluid, Kinetic and Hybrid Simulation Strategies for Modeling Chemically Complex Inductively Coupled Plasmas.- Transport and Reaction in Inductively Coupled Plasmas for Microelectronics.- Discharge Kinetics in Molecular Mass.- New Trends in the Kinetic Modeling of Discharges in Low Pressure Molecular Gases.- Electron Kinetics in Low-Voltage Cesium-Hydrogen Discharges.- Magnetized Discharges, Surface Wave Discharges.- Surface Wave Sustained Discharges.- Momentum Transfer Theory of Electron Transport in % MathType!MTEF!2!1!+- % feaafiart1ev1aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn % hiov2DGi1BTfMBaeXatLxBI9gBaerbd9wDYLwzYbItLDharqqtubsr % 4rNCHbGeaGqiVu0Je9sqqrpepC0xbbL8F4rqqrFfpeea0xe9Lq-Jc9 % vqaqFj0xd9q8as0-LqLs-Jirpepeea0-as0Fb9pgea0db9fr-xfr-x % frpeWZqaaeaabiGaciaacaqabeaadaqaaqaaaOqaaGqaaiqa-veaga % WcaiabgEna0kqa-jeagaWcaaaa!3D06! $$ \vec E \times \vec B $$ Field.- Hot Electrons in an Expanding Magnetized Hydrogen Plasma.- Advanced Diagnostics I.- Resonance Radiation Transport in Glow Discharge Plasmas.- Optical Characterization of RF Inductively Coupled Plasmas.- Experimental Studies of RF Sheaths.- Time Resolved Measurements of Pulsed Discharges: The Role of Metastable Atoms in the Afterglow.- Advanced Diagnostics II.- Radio Frequency Capacitive Sheath Diagnostics by Time Resolved Measurements of Fast Electrons.- Probe Method for Investigation of Anisotropic Plasma.