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This accessible volume delivers a complete design methodology for
microelectromechanical systems (MEMS). Focusing on the scaling of
an autonomous micro-system, it explains the real-world problems and
theoretical concepts of several different aspects inherent to the
miniaturization of sensors and actuators. It reports on the
analysis of dimensional scaling, the modelling, design and
experimental characterization of a wide range of specific devices
and applications, including:
temperature microsensors based on an integrated complementary
metal-oxide-semiconductor (CMOS) thermocouple;
mechanical sensors;
inductive microsensors for the detection of magnetic
particles;
electrostatic, thermal and magnetic actuators.
With an original approach, this informative text encompasses the
entire range of themes currently at the forefront of MEMS,
including an analysis of the importantissue of energy sources in
MEMS. In addition, the book explores contemporary research into the
design of complete MEMS with a case study on colonies of
microbots.
Scaling Issues and Design of MEMS aims to improve the
reader's basic knowledge on modelling issues of complex micro
devices, and to encourage new thinking about scaling effects. It
will provide support for practising engineers working within the
defence industry and will also be of welcome interest to graduate
students and researchers with a background in electronic
engineering, physics, chemistry, biology and materials science.
Autorentext
Salvatore Baglio, Associate Professor of Electronic
Instrumentations and Measurements, University of Catania,
Italy. Salvatore Baglio has co-authored over 150 scientific
publications and his research interests include nonlinear and
chaotic dynamical systems, smart sensors, microsensors and
Microsystems.
Salvatore Castorina, Electrical and Electronic
Measurements Group, University of Catania. Salvatore
Castorina is co-author of over 20 scientific papers and his
research interests include micro and nano electromechanical
systems, magnetic and thermal, micro sensors and micro actuators,
micro and nano robotics.
Luigi Fortuna, Professor of System Theory, University of
Catania. Luigi Fortuna has published more than 280 technical
papers and his interests include nonlinear science and complexity,
chaos and cellular neural networks.
NicolòSavalli, Engineering Faculty,
University of Catania. Nicolò Savalli teaches courses in
Measurement Theory and Measurement Applications and is co-author of
more than 35 scientific publications. His research interests
include micro-electro-mechanical-systems (MEMS) and
micro-opto-electro-mechanical-systems (MOEMS).
Zusammenfassung
This accessible volume delivers a complete design methodology for microelectromechanical systems (MEMS). Focusing on the scaling of an autonomous micro-system, it explains the real-world problems and theoretical concepts of several different aspects inherent to the miniaturization of sensors and actuators. It reports on the analysis of dimensional scaling, the modelling, design and experimental characterization of a wide range of specific devices and applications, including:
Scaling Issues and Design of MEMS aims to improve the reader's basic knowledge on modelling issues of complex micro devices, and to encourage new thinking about scaling effects. It will provide support for practising engineers working within the defence industry and will also be of welcome interest to graduate students and researchers with a background in electronic engineering, physics, chemistry, biology and materials science.
Inhalt
Preface.
Introduction.
1.1 Introduction to Scaling Issues.
1.2 Examples of Dimensional Scaling Potentials.
1.2.1 Scaling effects on a cantilever beam.
1.2.2 Scaling of electrostatic actuators.
1.2.3 Scaling of thermal actuators.
1.3 Motivation, Fabrication and Scaling of MEMS.
1.4 Scaling as a Methodological Approach.
References.
2.1 Electrostatic Actuators.
2.1.1 Transverse combs modelling.
2.1.2 Lateral combs modelling.
2.2 Magnetic Transducers.
2.2.1 Magnetic actuators.
2.2.2 Ferromagnetic transducers.
2.3 Thermal Actuators.
2.3.1 Thermomechanical actuators.
Acknowledgements.
References.
3.1 Thermoelectric Sensors.
3.2 Application: Dew-Point Relative Humidity Sensors.
3.2.1 Device structures and operating principles.
3.2.2 Device modelling and simulations.
3.2.3 Device design.
3.3 Conclusions.
Acknowledgements.
References.
4.1 Inductive Microsensors for Magnetic Particles.
4.1.1 Integrated inductive sensors.
4.1.2 Planar differential transformer.
4.1.3 Signal-conditioning circuits.
4.1.4 Simulation of the planar differential transformer.
4.1.5 Experimental results.
4.2 Magnetic Immunoassay Systems.
Acknowledgements.
References.
5.1 Introduction.
5.2 Device Modelling and Fabrication Processes.
5.2.1 Fabrication processes.
5.2.2 Devices modelling.
5.2.3 Accelerometers.
5.2.4 Resonant mass sensors.
5.3 Experimental Device Prototypes.
5.3.1 CMOS devices.
5.3.2 SOI devices.
5.3.3 Finite element modelling.
5.4 Scaling Issues on Microaccelerometers and Mass Sensors.
5.5 Some Experimental Results.
5.6 Vibrating Microgyroscopes.
5.6.1 Coupled vibratory gyroscopes.
Acknowledgements.
References.
6.1 Introduction.
6.2 Energy Supply Strategies for Autonomous Microsystems.
6.2.1 Use of microlenses in photothermomechanical actuation.
6.2.2 Technologies, materials and design of photothermomechanical actuators.
6.3 Photothermomechanical and Photothermoelectric Strategies for Highly Efficient Power Supply of Autonomous Microsystems.
6.3.1 Photothermoelectric power generation.
6.4 Efficiency of the Combined Energy Supply Strategy 166.
References.
7.1 Design Issues in Microrobots.
7.2 A Microrobot Architecture Based on Photothermal Strategy.
7.3 A Microrobot as a Paradigm for the Analysis of Scaling in Microsystems.
References.
8.1 Semiconductor-Based Nano-Electromechanical Systems.
8.2 Nanofabrication Facilities.
8.3 Overview of Nanosensors.
8.3.1 Use of AFM for materials and nanodevices characterization.
8.3.2 Scanning thermal microscopy (SThM).
8.3.3 Scanning Hall probe microscopy.
8.3.4 Mechanical resonant immunospecific biological detector.
8.3.5 Micromechanical sensor for differential detection of nanoscale motions.
8.3.6 Nanomagnetic sensors.
8.3.7 Nano-wire piezoresistors.
8.3.8 Nanometre-scale mechanical resonators.
8.3.9 Electric charge mechanical nanosensor.
8.4 Concluding Remarks.
References.
9.1 Introduction.
9.2 Examples of Scaling Cantilever Beam Devices. 9.3 DIEES-MEMSLAB-Tutorial.<...