Nanoelectronics

Offering first-hand insights by top scientists and industry experts at the forefront of R&D into nanoelectronics, this book neatly links the underlying technological principles with present and future applications. A brief introduction is followed by an overview of present and emerging logic devices, memories and power technologies. Specific chapters are dedicated to the enabling factors, such as new materials, characterization techniques, smart manufacturing and advanced circuit design. The second part of the book provides detailed coverage of the current state and showcases real future applications in a wide range of fields: safety, transport, medicine, environment, manufacturing, and social life, including an analysis of emerging trends in the internet of things and cyber-physical systems. A survey of main economic factors and trends concludes the book. Highlighting the importance of nanoelectronics in the core fields of communication and information technology, this is essential reading for materials scientists, electronics and electrical engineers, as well as those working in the semiconductor and sensor industries.

Autorentext

Robert Puers is Professor at the Faculty of Engineering of the Catholic University Leuven, Belgium, and Chair of the Leuven Nanocenter. He is a European research pioneer in micromachining, MEMS and packaging techniques, focused on biomedical implantable systems. Robert Puers took major efforts to increase the impact of MEMS in the international research community, in education as well as in industry. To commercialize his academic research achievements, he launched three spin-off companies, ICSense, Zenso and MinDCet.

Livio Baldi is currently a freelance consultant to Lfoundry S.r.l. He graduated in electronic engineering at the University of Pavia, Italy, and joined the company SGS-ATES (now STMicroelectronics) where he held various positions inside Central R&D. Later he was in charge of cooperative research projects for STMicroelectronics, within Framework Programmes and EUREKA programs for Nanoelectronics (MEDEA and CATRENE). He participated in setting-up the ETP Nanolectronics and has been active in the ENIAC and ECSEL JTIs.

Marcel Van de Voorde has 40 years` experience in European Research Organisations including CERN-Geneva, European Commission, with 10 years at the Max Planck Institute in Stuttgart, Germany. For many years, he was involved in research and research strategies, policy and management, especially in European research institutions. He holds a Professorship at the University of Technology in Delft, the Netherlands, as well as multiple visiting professorships in Europe and worldwide. He holds a doctor honoris causa and various honorary Professorships.
He is senator of the European Academy for Sciences and Arts, in Salzburg and Fellow of the World Academy for Sciences. He is a Fellow of various scientific societies and has been decorated by the Belgian King. He has authored of multiple scientific and technical publications and co-edited multiple books in the field of nanoscience and nanotechnology.

Sebastiaan E. van Nooten is currently an independent consultant to the semiconductor and semi-conductor equipment industry. After his graduation from the Technical University of Delft, The Netherlands, he joined the German company Telefunken. Subsequently, he held various positions in different companies in the European semiconductor equipment industry. Since 2007 he was engaged in several European cluster programs such as CATRENE and as project coordinator for ENIAC projects, a public-private partnership in nanoelectronics.

Inhalt

Foreword by Andreas Wild XXV

Nanoelectronics for Digital Agenda by Paul Rübig and Livio Baldi XXXVII

Electronics on the EU's Political Agenda by Carl-Christian Buhr XLI

Preface by Livio Baldi and Marcel H. van de Voorde XLVII

Volume 1

Part One Fundamentals on Nanoelectronics 1

1 A Brief History of the Semiconductor Industry 3
Paolo A. Gargini

1.1 From Microelectronics to Nanoelectronics and Beyond 3

1.2 The Growth of the Semiconductor Industry: An Eyewitness Report 22

Acknowledgments 52

**2 More-than-Moore Technologies and Applications 53
**Joachim Pelka and Livio Baldi

2.1 Introduction 53

2.2 "More Moore" and "More-than-Moore" 54

2.3 From Applications to Technology 56

2.4 More-than-Moore Devices 58

2.5 Application Domains 61

2.6 Conclusions 70

Acknowledgement 71

References 71

**3 Logic Devices Challenges and Opportunities in the Nano Era 73
**Frédéric Boeuf

3.1 Introduction: Dennard's Scaling and Moore's Law Trends and Limits 73

3.2 Power Performance Trade-Off for 10 nm, 7 nm, and Below 75

3.3 Device Structures and Materials in Advanced CMOS Nodes 89

**4 Memory Technologies 113
**Barbara De Salvo and Livio Baldi

4.1 Introduction 113

4.2 Mainstream Memories (DRAM and NAND): Evolution and Scaling Limits 115

4.3 Emerging Memories Technologies 120

4.4 Emerging Memories Architectures 130

4.5 Opportunities for Emerging Memories 133

4.6 Conclusions 134

Part Two Devices in the Nano Era 137

**5 Beyond-CMOS Low-Power Devices: Steep-Slope Switches for Computation and Sensing 139
**Adrian M. Ionescu

5.1 Digital Computing in Post-Dennard Nanoelectronics Era 139

5.2 Beyond CMOS Steep-Slope Switches 143

5.3 Convergence of Requirements for Energy-Efficient Computing and Sensing Technologies: Enabling Smart Autonomous Systems for IoE 148

5.4 Conclusions and Perspectives 149

References 151

**6 RF CMOS 153
**Patrick Reynaert, Wouter Steyaert and Marco Vigilante

6.1 Introduction 153

6.2 Toward 5G and Beyond 153

6.3 CMOS @ Millimeter-Wave: Challenges and Opportunities 156

6.4 Terahertz in CMOS 159

6.5 Conclusions 161

References 162

**7 Smart Power Devices Nanotechnology 163
**Gaudenzio Meneghesso, Peter Moens, Mikael Östling, Jan Sonsky, and Steve Stoffels

7.1 Introduction 163

7.2 Si Power Devices 164

7.3 SiC Power Semiconductor Devices 176

7.4 Power GaN Device Technology 184

7.5 New Materials and Substrates for WBG Power Devices 198

References 201

**8 Integrated Sensors and Actuators: Their Nano-Enabled Evolution into the Twenty-First Century 205
**Frederik Ceyssens and Robert Puers

8.1 Introduction 205

8.2 Sensors 208

8.3 Actuators 214

8.4 Molecular Motors 217

8.5 Transducer Integration and Connectivity 218

8.6 Conclusion 219

References 220

Part Three Advanced Materials and Materials Combinations 223

**9 Silicon Wafers as a Foundation for Growth 225
**Peter Stallhofer

9.1 Introduction 225

9.2 Si Availability and Technologies to Produce Hyperpure Silicon in Large Quantities 226

9.3 The Exceptional Physical and Technological Properties of Monocrystalline Silicon for Device Manufacturing 237

9.4 Silicon and New Materials 241

9.5 Example of Actual Advanced 300 mm Wafer Specification for Key Parameters 242

Acknowledgments 242

References 242 **10 Nanoanalysis 245<br ...